Glove box and atomic layer deposition combination coating equipment

Abstract

The invention discloses a glove box and atomic layer deposition coating equipment. The glove box and the atomic layer deposition combination coating equipment comprises a cleaning system, a precursorsystem, a heating system, a control system, a glove box system and a working reaction zone system; the cleaning system is used for being filled with inert gas; the precursor system is used for providing a gaseous phase precursor required by a deposition layer; the heating system is controlled by the control system through a circuit, and is used for heating the precursor system, a pipeline and theworking reaction zone system; starting and stopping of the cleaning system and the precursor system and the working temperature of the heating system are controlled by the control system; the glove box system is used for providing an inert protective gas environment for active metal materials; and the working reaction zone system is used for storing samples and acting as a working zone where the samples react with precursors. According to the glove box and the atomic layer deposition combination coating equipment, the deposition process of materials can be achieved in inert gas atmosphere, andmeanwhile the aspects such as effective control over the uniformity and the thickness of the deposition layer can be guaranteed.

Description

technical field [0001] The invention relates to the technical field of coating equipment, in particular to a coating equipment in which a glove box is combined with atomic layer deposition. Background technique [0002] Active metal materials such as metal lithium, sodium, etc., have the smallest atomic radius among all metals due to their low relative atomic mass, which makes them have extremely high electrochemical equivalent and fast transport behavior. Due to its special chemical properties such as low density and high specific energy, it has broad application prospects in the energy field such as batteries. However, due to its extremely high reactivity, it can react slowly even in dry air. Taking metal lithium as an example, when metal lithium is used as the negative electrode of the battery, it exhibits the most negative potential (-3.040Vvs standard hydrogen electrode). This makes lithium metal batteries with metallic lithium as the negative electrode have higher vo...

AI Technical Summary

Problems solved by technology

However, due to the extremely high reactivity of active metal materials, the existing atomic layer deposition cannot completely avoid the contact of active metal materials with H2O and O2, resulting in the occurrence of material corrosion

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