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Polarization imaging method and device thereof, and polarization imaging system

A polarization imaging and polarization image technology, applied in the field of polarization imaging methods and devices, and polarization imaging systems, can solve the problems of increasing the numerical aperture of the collection lens, increasing polarization imaging errors, detection errors, etc., and achieve simple polarization imaging methods and reduce Polarization attribute error, effect of improving resolution

Inactive Publication Date: 2019-06-04
TSINGHUA BERKELEY SHENZHEN INST
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Problems solved by technology

However, in the actual polarization imaging process, the incident light on the object side of the collecting lens is not all parallel light, and there are some non-parallel light at a certain angle with the optical axis of the collecting lens. The existence of the non-parallel light will introduce detection errors; And when improving the resolution of polarization imaging, it is necessary to increase the diameter of the collection lens or reduce the focal length of the collection lens to increase the numerical aperture of the collection lens, which will further increase the error of polarization imaging

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  • Polarization imaging method and device thereof, and polarization imaging system
  • Polarization imaging method and device thereof, and polarization imaging system
  • Polarization imaging method and device thereof, and polarization imaging system

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Embodiment Construction

[0046] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0047] Because the optical method can perform non-contact high-resolution non-destructive inspection on the sample to be tested, the optical inspection method has a very wide range of applications in the field of measurement. On the basis of the traditional optical detection method, by adding a polarization module, the intensity information and polarization properties of the polarized beam passing through the sample are obtained, so as to obtain the microstructure information of the sample.

[0048] In the prior a...

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Abstract

The embodiment of the invention discloses a polarization imaging method and a device thereof, and a polarization imaging system. In the polarization imaging method, through changing the position of anaperture light hole, polarized transmitted beams in different angle ranges and / or in different directions after a collecting lens pass through the aperture light hole, multiple first polarization properties of a standard sample and multiple second polarization properties of a to-be-tested sample are acquired, multiple polarization property errors are obtained by the multiple first polarization properties of the standard sample and the standard properties of the standard sample, and thus, after the multiple second polarization properties of the to-be-tested sample in different angles are acquired, the multiple second polarization properties in different angles are calibrated by the polarization property errors, on the premise of reducing the polarization property errors of the acquired multiple second polarization properties, the resolution of the polarization image of the to-be-tested sample is improved, the anisotropy information of the to-be-tested sample is acquired, and the polarization imaging method is simple and the cost is low.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of polarization imaging, and in particular, to a polarization imaging method and device thereof, and a polarization imaging system. Background technique [0002] Polarization imaging technology is an advanced characterization method. Its basic principle is to obtain part or all of the polarization state information of the measured light by measuring the different polarization components of the light, and analyze and calculate these polarization information images to obtain polarization Parametric images, such as polarization degree, polarization angle, ellipticity angle, polarization transmission characteristics, depolarization characteristics, etc., are used to analyze the shape, roughness, medium characteristics and even biochemical characteristics of the measured object. [0003] The traditional polarization imaging method focuses the polarized light scattered through the sample to b...

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Application Information

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IPC IPC(8): G01J3/447
CPCG01J3/447G01J4/00
Inventor 马辉何宏辉孟若愚
Owner TSINGHUA BERKELEY SHENZHEN INST