Polarization imaging method and device thereof, and polarization imaging system
A polarization imaging and polarization image technology, applied in the field of polarization imaging methods and devices, and polarization imaging systems, can solve the problems of increasing the numerical aperture of the collection lens, increasing polarization imaging errors, detection errors, etc., and achieve simple polarization imaging methods and reduce Polarization attribute error, effect of improving resolution
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[0046] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.
[0047] Because the optical method can perform non-contact high-resolution non-destructive inspection on the sample to be tested, the optical inspection method has a very wide range of applications in the field of measurement. On the basis of the traditional optical detection method, by adding a polarization module, the intensity information and polarization properties of the polarized beam passing through the sample are obtained, so as to obtain the microstructure information of the sample.
[0048] In the prior a...
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