Device and method for measuring pumping speed of micro vacuum pump through constant conductance method flow meter

A micro-vacuum pump and flowmeter technology, which is applied in the direction of pumps, pump testing, liquid displacement machinery, etc., can solve the problem that the flowmeter cannot meet the requirements of micro-vacuum pumps, etc.

Inactive Publication Date: 2019-06-07
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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Problems solved by technology

[0003] The pumping speed of the miniature vacuum pump requires a small amount of gas, and its flow range is (5×10 -6 ~1×10 -9 )Pa·m 3 / s, so the flow meter specified in the existing vacuum pump pumping speed measurement cannot meet the requirements of the micro vacuum pump

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  • Device and method for measuring pumping speed of micro vacuum pump through constant conductance method flow meter
  • Device and method for measuring pumping speed of micro vacuum pump through constant conductance method flow meter
  • Device and method for measuring pumping speed of micro vacuum pump through constant conductance method flow meter

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Embodiment Construction

[0025] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0026] The invention provides a device and a method for measuring the pumping speed of a miniature vacuum pump with a fixed conductance flowmeter.

[0027] Can provide (5×10 -6 ~1×10 -9 )Pa·m 3 Flow meters in the / s range include constant pressure gas micro flow meters, constant volume gas micro flow meters and fixed conductance flow meters. Among them, the basic working principle of the constant pressure gas micro flowmeter is that under the condition of constant gas pressure, the piston rod advances at a constant speed to generate gas flow. Due to the limited length of the piston rod, the working time is limited each time, usually a few minutes, which cannot meet the long vacuum pump requirements. Time (more than 20 minutes) vacuum pump pumping speed measurement requirements; the prerequisite for constant volume flowmeter flow measurement is that the ...

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Abstract

The invention discloses a device and a method for measuring pumping speed of a micro vacuum pump through a constant conductance method flow meter. The device and the method can be used for realizing precise measurement on pumping speed of the micro vacuum pump. The constant conductance method flow meter can be used to generate micro flow, and also stable gas flow can be provided for a long time, so that the needed micro stable gas flow problem in measurement of the pumping speed of the micro vacuum pump is solved; and meanwhile, a general method for measuring an up-down symmetrical structure of a test cover for ultrahigh vacuum pump pumping speed test is avoided, the inner surface area of the test cover is reduced, gas release influence quantity of the surface area of the test cover is reduced, test accuracy is improved, and accurate measurement for pumping speed of the micro vacuum pump is realized.

Description

technical field [0001] The invention relates to the technical field of vacuum pump measurement, in particular to a device and method for measuring the pumping speed of a miniature vacuum pump by a fixed conductance flowmeter. Background technique [0002] A flow meter is required to provide a standard gas flow when measuring vacuum pump performance. Generally, the flow meter for measuring the pumping speed of the vacuum pump provides a large gas flow rate, such as: "Measurement Method for Volumetric Vacuum Pump Performance" (JB / T7266-94) is equivalent to the international standard "Measurement Method for Volumetric Vacuum Pump Performance - Part 1: Volume Flow Rate "Measurement of (pumping speed)" (ISO 1607 / II-1980), "Measurement Method of Volumetric Vacuum Pump Performance" stipulates that the flowmeter should be a dropper flowmeter and a glass rotameter, and the flow range of the dropper flowmeter is (1.25×10 -4 ~14.3) Pa·m 3 / s, the flow range of the glass rotameter is ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B51/00F04B37/14
Inventor 成永军郭美如习振华王永军裴晓强董猛赵澜盛学民汪宁
Owner LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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