Unlock instant, AI-driven research and patent intelligence for your innovation.

Sputtering machine ring hole position detecting tool and method

A technology of hole position detection and sputtering machine, which is applied in the direction of angle/taper measurement, etc. It can solve the problems that the ring cannot be installed on the machine, the detection process is difficult, the atoms deviate from the sputtering direction, etc., and the operation is simple and the detection process is simple. Simple and efficient detection

Inactive Publication Date: 2019-06-18
KONFOONG MATERIALS INTERNATIONAL CO LTD
View PDF5 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to facilitate the installation of the ring, there are multiple mounting holes on the ring. Whether the included angle between the axes of any two adjacent mounting holes is correct or not is related to the installation of the ring. If the included angle is not correct The ring is installed on the sputtering machine, which will make the ring form an irregular circular structure, which will make the atoms deviate from the correct sputtering direction, and even make the ring unable to be installed on the machine.
Since there is a gap on the ring, and the ring has a certain degree of elasticity, this has caused great difficulties in the detection process

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Sputtering machine ring hole position detecting tool and method
  • Sputtering machine ring hole position detecting tool and method
  • Sputtering machine ring hole position detecting tool and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0073] Docking step S101: Sleeve the ring on the outside of the inspection tool, and correspond each installation hole on the ring with each insertion hole on the inspection tool;

[0074] Detection step S102: Pass each pin through each mounting hole one by one and insert into each insertion hole corresponding to each mounting hole.

[0075] The specific operation process is as follows:

[0076] Such as figure 2 As shown, the docking step S101 is first performed. In this step, the ring to be tested 3 is sleeved on the outside of the inspection tool, and each mounting hole on the ring to be tested 3 is aligned with each insertion hole on the inspection tool. One-to-one correspondence; then the detection step S102 is carried out, in this step, each pin is passed through each mounting hole one by one and inserted into each insertion hole corresponding to each installation hole, when the pin can be smoothly inserted into each insertion hole through the installation hole If it i...

Embodiment 2

[0078] Positioning step S201: clamping the inspection tool with the external object, so as to limit the position of the inspection tool relative to the external object;

[0079] Docking step S202: Sleeve the ring on the outside of the inspection tool, and make one-to-one correspondence between each installation hole on the ring and each insertion hole on the inspection tool;

[0080] Detection step S203: Pass each pin through each mounting hole one by one and insert into each insertion hole corresponding to each mounting hole.

[0081] The specific operation process is as follows:

[0082] Such as image 3 As shown, the positioning step S201 is first performed. In this step, the inspection tool is clamped with the external object to limit the position of the inspection tool relative to the external object, so that the inspector does not need to limit the position of the inspection tool 1 during inspection. It is convenient for the testing personnel to detect; then the dockin...

Embodiment 3

[0084] Positioning step S301: clamping the inspection tool with the external object to limit the position of the inspection tool relative to the external object;

[0085] Docking step S302: Sleeve the ring on the outside of the inspection tool, and make one-to-one correspondence between each installation hole on the ring and each insertion hole on the inspection tool;

[0086] Detection step S303: When the number of mounting holes of the ring is odd, first pass a pin through the mounting hole in the middle position and insert it into the insertion hole corresponding to the mounting hole, and then pass the remaining pins to the middle position The remaining mounting holes on both sides of the mounting hole are inspected;

[0087] When the number of ring mounting holes is an even number, first pass a pin through any one of the two mounting holes located in the middle and insert the pin into the corresponding insertion hole of the mounting hole, then Use the remaining pins to de...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a sputtering machine ring hole position detecting tool and method and relates to the sputtering machine ring detection technology field. The sputtering machine ring hole position detecting tool comprises a detection tool and a plurality of pins. The detection tool has an outer circumferential surface attached to an inner surface of a ring to be detected and the detection tool is provided with a plurality of insertion holes. Each insertion hole is used for installing one pin. An included angle between axes of any two adjacent insertion holes is a standard included angle.An aperture of each insertion hole is equal to the aperture of a standard ring installing hole. The sputtering machine ring hole position detecting tool can detect whether the included angle between the axes of any two adjacent installing holes is standard according to whether the pins can be inserted into the insertion holes through the installing hole. A detection process is simple, the ring isnot additionally damaged, and detection efficiency is high.

Description

technical field [0001] The invention relates to the technical field of detection of sputtering machine rings, in particular to a tool and method for detecting hole positions of sputtering machine rings. Background technique [0002] In the production process of semiconductor chips, a ring is installed between the sputtering target and the single crystal silicon carrier. The ring is installed on the sputtering machine, and the current is energized to generate a magnetic field around the sputtering target. Atoms can be evenly attached to the single crystal silicon carrier through a magnetic field. [0003] In order to facilitate the installation of the ring, there are multiple mounting holes on the ring. Whether the included angle between the axes of any two adjacent mounting holes is correct or not is related to the installation of the ring. If the included angle is not correct When the ring is installed on the sputtering machine, the ring will form an irregular circular str...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01B5/24
Inventor 姚力军潘杰王学泽陈文庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD