A high-precision optical accelerometer based on zipper-type photonic crystal micro-nano cavity

Abstract

The invention discloses a high-precision photodynamic accelerometer based on a zipper type photonic crystal micro-nano cavity. The accelerometer comprises a laser input and reception structure arranged in the left and right sides of the accelerometer structure, a silicon micro mechanical structure arranged in the middle portion of the accelerometer, and a glass substrate structure positioned in the bottom of the silicon micro mechanical structure and provided with electrodes. A laser incident structure is arranged in an input groove in the left side of a main silicon microstructure, a reception structure is arranged in an output groove in the right side of the main silicon microstructure. An optical signal serves as a measurement signal of the micro accelerometer, the sensitivity is high,the uncertainty is low, the detection limit of the micro accelerometer is improved, and the detection sensitivity is improved greatly. The zipper type photonic crystal micro-nano cavity is used, the performance is more stable and the optical precision is higher compared with a common planar parallel resonance micro-nano cavity at present, and higher acceleration sensitivity is achieved.

Description

technical field [0001] The invention belongs to the technical field of micro-optical electromechanical systems and micro-inertial measurement, and relates to an accelerometer, more specifically, to a high-precision optical sensor based on a zipper-type photonic crystal microcavity that can be used for out-of-plane horizontal axis acceleration sensitivity. force accelerometer. Background technique [0002] Micro-opto-electro-mechanical system (MOEMS) is a very dynamic new technology system developed in micro-electro-mechanical system (MEMS) in recent years. It is a combination of micro-optics, micro-electronics and micro-mechanics. The new micro-optical structure system can give full play to the comprehensive performance of the three. Compared with conventional systems, micro-opto-electromechanical systems have significant advantages such as small size, light weight, compatibility with large-scale integrated circuit manufacturing processes, easy mass production, and low cost...

AI Technical Summary

Problems solved by technology

However, as the requirements for the performance of micro-machined accelerometers continue to increase, the demand for high-precision micro-accelerometers at the inertial navigation level is becoming more and more urgent. However, the MOEMS accelerometers in the prior art have low detection sensitivity and cannot meet the needs.

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