A double-sided alignment vision system and alignment method

Abstract

The invention discloses a vision system for double-sided alignment, which is used to realize the alignment function of two objects to be measured opposite in space, comprising: two opposite adjustment tables, and the two opposite surfaces of the adjustment table Place the measured object A and the measured object B; wherein, the measured object A and the measured object B contain graphics or shape features; align the measurement unit, including reflective components, relay components, spectroscopic components, imaging front groups, The beam splitting component, the post-imaging group, the lighting component and the photoelectric conversion component; the display unit is used to display the graphics after the object A and the object B are aligned. The invention provides a vision system and alignment method for double-sided alignment, which improves the light energy utilization rate and imaging contrast, and further improves the alignment accuracy; ensures that the two sides of the space are mirror images or the shape of the measured object The features can be imaged and overlapped on the same photoelectric conversion component; meanwhile, the alignment efficiency of the measured object is improved.

Description

technical field [0001] The invention relates to the field of machine vision, in particular to a double-sided alignment vision system and alignment method. Background technique [0002] In the manufacturing process of semiconductor chips and optoelectronic devices, visual alignment systems are often used to position and align devices. With the increase in the number of integrated circuits per unit area on semiconductor chips, the accuracy requirements for manufacturing, assembly and testing are getting higher and higher. With the help of the vision system, the positioning and alignment accuracy of such devices can be significantly improved. [0003] One of the alignment methods is mainly used for alignment between two-layer devices. Usually, the devices are arranged up and down, and the upper and lower layers of devices contain mirror images. There are generally two ways to achieve upper and lower alignment: 1) Indirect alignment , two sets of visual alignment systems are us...

AI Technical Summary

Problems solved by technology

use figure 1 The described direct alignment device and method are simple to implement, but there are three problems as follows: (1), the coaxial light source cannot be added to the imaging lens, otherwise the reflector will introduce most of the light source into the camera target surface, causing the object surface mark imaging The contrast decreases and the alignment accuracy is poor; (2), after multiple reflections, the energy utilization rate is low, and only 1 / 4 of the object surface light energy of one optical path enters the imaging optical path, and the imaging contrast is also poor; (3), due to the mirror image relationship , when the marks of the upper and lower layers of the device are imaged on the same camera, they will form an inverted image in the X direction, and the registration and alignment function of the marks cannot be realized in this direction.

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