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Free-curved surface-based CO2 telecentric f-theta lens capable of eliminating field curvature and astigmatism

A technology of eliminating astigmatism and curved surface, applied in optical components, optics, instruments, etc., can solve the problems of field curvature and astigmatism, affecting working accuracy, etc.

Active Publication Date: 2019-07-12
NANJING WAVELENGTH OPTO ELECTRONICS SCI & TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing telecentric F-theta lens still has the defects of large field curvature and astigmatism, which affects the working accuracy

Method used

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  • Free-curved surface-based CO2 telecentric f-theta lens capable of eliminating field curvature and astigmatism
  • Free-curved surface-based CO2 telecentric f-theta lens capable of eliminating field curvature and astigmatism
  • Free-curved surface-based CO2 telecentric f-theta lens capable of eliminating field curvature and astigmatism

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Such as figure 1 As shown, the CO 2 The telecentric f-theta lens includes a first lens G1, a second lens G2, a third lens G3, and a fourth lens G4 arranged in sequence along the incident light transmission direction; the first lens is a meniscus negative lens, and the The second lens is a meniscus positive lens, the third lens is a plano-convex positive lens, and the fourth lens is a biplane protective window.

[0038] Along the transmission direction of the incident light, the two surfaces of the first lens are the first object side S2 and the first image side S3 in sequence, the two surfaces of the second lens are the second object side S4 and the second image side S5 in sequence, and the two surfaces of the third lens are in sequence It is the third object side surface S6 and the third image side surface S7, and the two surfaces of the fourth lens are the fourth object side surface S8 and the fourth image side surface S9 in sequence.

[0039] In this example, f1 / f0=-2.29...

Embodiment 2

[0052] Such as Figure 5 As shown, the CO 2 The telecentric f-theta lens includes a first lens G1, a second lens G2, a third lens G3, and a fourth lens G4 arranged in sequence along the incident light transmission direction; the first lens is a meniscus negative lens, and the The second lens is a meniscus positive lens, the third lens is a plano-convex positive lens, and the fourth lens is a biplane protective window.

[0053] Along the transmission direction of the incident light, the two surfaces of the first lens are the first object side S2 and the first image side S3 in sequence, the two surfaces of the second lens are the second object side S4 and the second image side S5 in sequence, and the two surfaces of the third lens are in sequence It is the third object side surface S6 and the third image side surface S7, and the two surfaces of the fourth lens are the fourth object side surface S8 and the fourth image side surface S9 in sequence.

[0054] In this example, f1 / f0=-1.94...

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Abstract

The invention discloses a Free-curved surface-based CO2 telecentric f-theta lens capable of eliminating field curvature and astigmatism. The theta lens comprises a first lens, a second lens, a third lens and a fourth lens which are sequentially arranged in the incident light transmission direction; the first lens is a meniscus negative lens, the second lens is a meniscus positive lens, the third lens is a plano-convex positive lens, and the fourth lens is a biplane protection window piece. In the incident light transmission direction, two surfaces of the first lens are a first object side surface and a first image side surface in sequence, and the first image side surface is a free-curved surface. CO2 telecentric f-based on free-form surface field elimination curve and astigmatism elimination According to the theta lens, through the design of the free-curved surface, the field curvature and astigmatism are both reduced by at least one order of magnitude, and the astigmatism and the field curvature are both smaller than 0.02 mm.

Description

Technical field [0001] The invention relates to a CO 2 Telecentric f-theta lens, belonging to CO 2 Telecentric f-theta lens field. Background technique [0002] Galvanometer laser scanning technology is widely used in laser marking, laser drilling, laser scanning display and other technologies due to its advantages of high speed and precise scanning. The high-energy laser beam emitted by the laser passes through X and Y which are perpendicular to each other in the direction of vibration. The galvanometer lens, incident on the f-theta scanning mirror, is focused by the f-theta scanning mirror to reach the surface of the workpiece; by rotating the X and Y scanning galvanometer mirrors, the laser beam can be controlled to move in the X and Y directions of the workpiece surface and in any direction, Realize vector marking or punching. [0003] The design of f-theta scanning mirror requires the entire field to be flat, field curvature will cause the best working surface to bend, astigm...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B13/00G02B13/22G02B27/00G02B1/00
CPCG02B13/0005G02B13/22G02B27/0025G02B1/00
Inventor 梁思远王国力吴玉堂朱敏刘建芬刘旭东
Owner NANJING WAVELENGTH OPTO ELECTRONICS SCI & TECH CO LTD