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Optical path structure of small echelle grating spectrometer

An echelle grating and spectrometer technology, which is applied in the field of spectral analysis instruments, can solve problems such as low resolution, and achieve high spectral resolution, fast detection speed, and easy modularization.

Inactive Publication Date: 2012-11-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

Since the spectrometer uses a grating to decompose the incident polychromatic light into a spectrum, which is received by a linear array detector, the resolution is low

Method used

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  • Optical path structure of small echelle grating spectrometer

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Embodiment 1

[0019] In the optical path structure of the present invention, both the collimating mirror 3 and the focusing mirror 6 are spherical mirrors, the radius of curvature is 200.76mm, the off-axis angles are 5.2° and 8.63° respectively, and the focal length is 100mm; the echelle grating 4 adopts a grating constant d is 1 / 54.49mm reflective engraved echelle grating, and the incident angle is 46°; for the convenience of optical path arrangement, the echelle grating is rotated 3° along the normal direction of the optical axis (that is, grating deflection angle: γ=3°); The cross-dispersion prism 5 is composed of fused silica with a half top angle of 10°, and the incident angle is 21.01°; the area array detector 8 uses an e2v back-illuminated CCD47-10AIMA chip, with a resolution of 1024×1024 pixels and a spectral response within the range of 180-300nm very high.

[0020] Through optical design software tracing, the theoretical resolution of the light path structure of the small échelle ...

Embodiment 2

[0022] In this embodiment, the radius of curvature of the collimating mirror 3 and the focusing mirror 6 in the optical path structure of the invention is changed to 200.66 mm, and the optical tracking is carried out under the condition that other structural parameters remain unchanged, and the system resolution is 0.023 nm to 200 nm.

Embodiment 3

[0024] In this embodiment, the off-axis angle of the collimating mirror 3 in the optical path structure of the invention is changed to 5.1°, and the optical tracking is performed while other structural parameters remain unchanged, and the system resolution is 0.025 nm to 200 nm.

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Abstract

The invention relates to an optical path structure of a small echelle grating spectrometer. The structure includes a condenser lens, an incident pinhole, a collimating lens, an echelle grating, a cross dispersion prism, a focusing lens, a cylindrical lens and an area-array detector; the collimating lens and the focusing mirror are spherical mirrors; the condenser lens makes an incident light beam focused to the incident pinhole; a light beam emitted from the incident pinhole irradiates the collimating lens; a parallel light reflected by the collimating lens directly is directly incident to the surface of the echelle grating; a light beam diffracted by the echelle grating irradiates the focusing lens through the reflection of the cross dispersion prism; and a focused light reflected by the focusing lens is received by the area-array detector after the achromatic treatment of the cylindrical lens. The optical path structure can be used for effectively balancing the contradiction between the high resolution and the small size of a conventional grating spectrometer and realizing the high spectral resolution with the structure of the small size and has the advantages of compact structure, small size, light weight, no moving parts, simultaneous measurement of wide spectral bands and the like.

Description

technical field [0001] The invention belongs to the technical field of spectrum analysis instruments and relates to an optical path structure of a small grating spectrometer. Background technique [0002] Spectroscopic instruments are basic testing equipment for spectral analysis. With the continuous development of modern science and technology, miniaturization, light weight, portability and high resolution have gradually become the mainstream trend in the development of spectroscopic instruments. (2008 Kunming University of Science and Technology Master's Thesis "Design Principle and Parameter Analysis of a Small Grating Spectrometer", 2009, Volume 17, Issue 1 "Design and Optimization of the Optical System of a Miniature Infrared Grating Spectrometer", 2010, Volume 3 Issue 3, "Design of stray light elimination for miniature flat-field near-infrared spectrometer") reported about "small grating spectrometer", which is composed of condenser mirror, incident pinhole, collimatin...

Claims

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Application Information

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IPC IPC(8): G01J3/18
Inventor 陈少杰宁春丽崔继承齐向东巴音贺希格唐玉国
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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