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Substrate evaporation contraposition system and method and device for measuring monitor pixel position

A pixel position and pixel technology, which is applied in the field of substrate evaporation alignment system and monitoring pixel position measurement, can solve the problems affecting the accuracy of OLED substrate evaporation alignment compensation amount and inaccurate monitoring pixel measurement

Active Publication Date: 2019-07-19
BOE TECH GRP CO LTD +1
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  • Claims
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Problems solved by technology

[0007] However, at present, there is a problem of inaccuracy in the position measurement of the monitoring pixel obtained by evaporation, and there is a deviation of about 1-2um, so this deviation affects the accuracy of determining the evaporation alignment compensation amount of the OLED substrate

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Embodiment Construction

[0034] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0035] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0036] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. The expression "and / or" used herein includes all or any elements and all combinations of one or more associated lis...

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Abstract

The invention discloses a substrate evaporation contraposition system and a method and device for measuring a monitor pixel position. The method comprises steps of carrying out edge shadow measurementand position measurement on a monitor pixel obtained by evaporation on a substrate; determining the edge climbing distance of the monitor pixel according to the measured edge shadow; and correcting the measured position data according to the edge climbing distance. By means of the device and the method, the measurement precision of the monitor pixel position can be improved, and the accuracy of determining the evaporation compensation amount of an OLED substrate is improved as well, so that the evaporation yield of the OLED substrate is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate evaporation alignment system and a method and device for monitoring pixel position measurement. Background technique [0002] An OLED display device includes a cathode layer, an organic material functional layer, an anode layer, etc., wherein the organic material functional layer is generally prepared by resistance heating evaporation method. During the evaporation process, the red pixel, the green pixel and the blue pixel need to be evaporated separately through an evaporation mask. [0003] In the evaporation alignment process of the OLED substrate, due to the difference between the manufacturing process deviation of the evaporation mask and the position deviation of the pixel holes on the OLED substrate, it is often necessary to perform a certain translation or rotation on the OLED substrate during the evaporation process, so that as much as possible The position...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/04C23C14/24
CPCC23C14/042C23C14/24C23C14/54
Inventor 谢飞吴建鹏安成国宋裕斌
Owner BOE TECH GRP CO LTD
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