Inclined push-pull baffle valve
A baffle valve, oblique technology, applied in the direction of sliding valve, valve details, valve device, etc., to achieve the effect of reducing the debugging time, easy control and simple structure
Pending Publication Date: 2019-07-30
爱发科真空技术(苏州)有限公司
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Problems solved by technology
[0014] The main technical problem to be solved by the present invention is to provide an oblique push-pull baffle valve, which can solve the problem of isolation and connection between chambers, and also reduces the difficulty of installation and debugging, reduces the length of debugging, and has a simple structure, easy control, Low cost of use
Method used
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[0029] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.
[0030] see Figure 1 to Figure 3 , the embodiment of the present invention includes:
[0031] An oblique push-pull baffle valve, applied in vacuum equipment with multiple chambers; the two connected chambers in the vacuum equipment are respectively a first chamber 1 and a second chamber 2, and the first chamber The internal pressure of the chamber 1 is lower than the internal pressure of the second chamber 2; there is a through port between the first chamber 1 and the second chamber 2 communicating the first chamber 1 and the second chamber 2 3. The through opening 3 can be used for the transfer tray in the vacuum equipment to move back and fort...
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The invention relates to the field of valves, and discloses an inclined push-pull baffle valve. The baffle valve comprises an isolating baffle, guiding mechanisms and push-pull mechanisms, wherein theisolating baffle is used for hermetically sealing a penetrating opening, the guiding mechanisms are used for assisting the isolating baffle in sealing the penetrating opening, and the push-pull mechanisms are used for controlling the isolating baffle to seal the penetrating opening or not; the guiding mechanisms are fixed inside a cavity, the push-pull mechanisms are obliquely arranged on the cavity, and the push-pull mechanisms and the guiding mechanisms are opposite and located on the two sides of the penetrating opening correspondingly; the isolating baffle is fixed on the push-pull mechanisms, the push-pull mechanisms extend to push the isolating baffle to be close to the penetrating opening, when the push-pull mechanisms make contact with the guiding mechanisms to be adjusted, the push-pull mechanisms stop pushing, and the isolating baffle seals the penetrating opening; and the push-pull mechanisms shorten to pull the isolating baffle to open and be far away from the penetratingopening, and until the isolating baffle is not in the extending range of the penetrating opening, the push-pull mechanisms stop pulling. According to the baffle valve, the effects of the sealing, isolating and communicating among all the cavities can be realized through the above mode, the installing and adjusting difficulty is reduced, the controlling is easy, and the use cost is low.
Description
technical field [0001] The invention relates to the field of valves, in particular to an oblique push-pull baffle valve. Background technique [0002] In various multi-chamber vacuum equipment, trays are shuttled between chambers for different processes. Due to the different functions of each chamber, the pressure and gas composition of each chamber are different within a certain period of time; therefore, the chambers need to be isolated under certain conditions and within a certain period of time. [0003] At present, the mechanical opening and closing valve bodies used to isolate each chamber on the market can be roughly divided into three categories: [0004] 1. Plug valve [0005] Take the external plug-in valve as an example, the principle is that the valve plate of the plug-in valve is inserted from one side of the through hole of the cavity to the other side of the through hole, and after being pressed tightly inside the valve body, the two sides of the cavity are ...
Claims
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IPC IPC(8): F16K3/30F16K31/12F16K31/44F16K3/316
CPCF16K3/30F16K31/12F16K31/44F16K3/3165
Inventor 张军委
Owner 爱发科真空技术(苏州)有限公司