Method for quickly measuring optical constants of ultra-thin film
A technology of optical constants and measurement methods, which is applied in the direction of measuring devices, optical devices, and scattering characteristic measurements, and can solve problems such as calculation result errors and limited calculation bands
Active Publication Date: 2019-08-13
HUAZHONG UNIV OF SCI & TECH
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The above two methods provide new ideas for the determination of optical constants of ultra-thin films, but they also have the defect of limited calculation bands, and there will be large errors in the calculation results of optical constants in shorter wavelength ranges such as ultraviolet bands
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[0056] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0057] like figure 1 As shown, an embodiment of the present invention provides a method for fast measurement of optical constants of ultra-thin films, which includes the following steps:
[0058] S1 obtains the p light amplitude reflection coefficient r incident on the ultra-thin film light source to be measured (ie, incident light) p and s light amplitude reflection coefficient r s , and use r ...
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Abstract
The invention belongs to the field of measurement characterization studies of optical properties of ultra-thin films, and particularly discloses a method for quickly measuring optical constants of anultra-thin film. The method comprises the following steps: S1, the amplitude reflection coefficient ratio meeting the relation of p=r / r<s> of an ultra-thin film material is expressed through a p optical amplitude reflection coefficient r and an s optical amplitude reflection coefficient r<s> of a light source irradiated to the to-be-measured ultra-thin film; S2, the relation of p=r / r<s> is subjected to second-order taylor expansion by taking 2 pi d<f> / lambda as the variable at the position meeting the relation of d<f>=0 to obtain second-order approximation forms; S3, the second-orderapproximation forms are combined, simplified and replaced to be converted into a quartic equation of one unknown; and S4, the quartic equation of one unknown is solved to obtain multiple solutions ofoptical constants of the ultra-thin film material, and the positive solutions are obtained through condition judgment so as to quickly measure the optical constants of the ultra-thin film. The opticalconstants of the ultra-thin film can be quickly measured, and the advantages of quick and accurate measurement and the like are achieved.
Description
technical field [0001] The invention belongs to the research field of ultra-thin film optical property measurement and characterization, and more particularly, relates to a method for fast measurement of ultra-thin film optical constants. Background technique [0002] With the rapid development of optoelectronic technology, the application scope of thin films has gradually expanded, and many ultra-thin films with a thickness of only tens or even several nanometers have become the current research hotspot. The optical constants of ultra-thin films are very critical in basic scientific research and the design and optimization of nano-optical devices, and the optical constants of ultra-thin films will change with thickness, preparation conditions, etc., and information in existing literature or databases cannot be simply used. Therefore, it is very important to realize the fast and accurate measurement of the optical constants of ultrathin films. [0003] The optical constant ...
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IPC IPC(8): G01N21/55
CPCG01N21/55G01N2021/213G01N21/211G01N21/8422G01N21/9501G01B11/0641
Inventor 谷洪刚刘世元祝思敏宋宝坤江浩陈修国
Owner HUAZHONG UNIV OF SCI & TECH