Charge controller for synchronous linear operation of multiple piezoelectric ceramics

Abstract

The present invention relates to a charge controller for the synchronous linear operation of multiple piezoelectric ceramics. The charge controller is characterized in that the charge controller comprises an inverting unit for converting a positive voltage input voltage signal Vin into a negative voltage signal, an output end of the inverting unit is connected to an inverting end of a high-voltagepower amplifier via a parallel impedance network, a positive phase end of the high-voltage power amplifier is grounded, a piezoelectric actuator Cp1 is connected across the inverting end and the output end of the high-voltage power amplifier, and a T type resistor network and a piezoelectric actuator are connected in parallel to form a high-voltage amplifier negative feedback network. One end ofeach of n piezoelectric ceramics for actual actuation is connected to the output end of the high-voltage power amplifier, the other end is grounded, and the capacitances of the n piezoelectric ceramics are approximately equal. In the present invention, by improving a DC feedback network in a conventional charge controller to the T type resistor network for feedback, the low-frequency performance of the controller is effectively improved, and the nonlinearity of the controller during a low-frequency operation is reduced by 71% compared with original nonlinearity.

Description

technical field [0001] The invention relates to a controller of a piezoelectric actuator, which belongs to the field of nanometer positioning, in particular to a piezoelectric displacement platform or a device that uses piezoelectric ceramics to generate high-precision micro-displacement. Background technique [0002] In order to solve the nonlinear problem of the displacement trajectory caused by the hysteresis of piezoelectric ceramics. It has long been proposed to use the method of charge control to improve the hysteresis of piezoelectric ceramics. compared to closed-loop and feed-forward control. The charge controller does not need a sensor and has a relatively simple circuit structure, and is often used in the field of high-precision displacement control. The charge controllers of traditional piezoelectric actuators use piezoelectric ceramics as a feedback element to control its displacement, which leads to the fact that the negative pole of the piezoelectric ceramic ...

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is: the piezoelectric actuator connected externally to the traditional charge controller has no grounding configuration, and the DC feedback network cannot be applied to the piezoelectric actuator with small capacitance and cannot be applied to multiple piezoelectric actuators. synchronous linear control

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