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111results about How to "Reduce electrical noise" patented technology

Micro electromechanical system piezoelectric transducer and manufacturing method thereof

The invention discloses a micro-electromechanical system piezoelectric transducer and a manufacturing method thereof, in particular an array piezoelectric transducer and a manufacturing method, and belongs to the micro-electromechanical system field. The transducer adopts array design and is composed of at least two array elements. The wafer-level electrical series connection or parallel connection between the array elements is realized by a micro-electromechanical system (MEMS) process compatible with the semiconductor process, but at least one electrical series connection is provided; Semiconductor MEMS process can effectively control the parasitic capacitance generated by electrical series and parallel connection, thus effectively improve the sensitivity. The invention improves the sensitivity of the transducer through the wafer-level electric series and parallel connection between the array elements. Compared with the traditional piezoelectric ceramic transducer, the parasitic capacitance caused by the following circuit string and parallel connection is avoided. A wafer-level array MEMS transducer is proposed. The array transducer can be connected in series with different arrayelements according to the needs, so that the sensitivity of the transducer can be defined independently. The transducer also has the advantages of high signal-to-noise ratio, low cost, low electricalnoise and high signal-to-noise ratio.
Owner:徐景辉

Satellite ground micro-vibration test system

The invention discloses a satellite ground micro-vibration test system. The satellite ground micro-vibration test system comprises a high-sensitivity sensor used for extracting vibration signals near a disturbance source or a load, an anti-aliasing filter used for performing anti-aliasing filtering on the vibration signals extracted by the high-sensitivity sensor to form piezoelectric signals, a high-modulus conversion rate acquirer used for generating the piezoelectric signals into digital signals and a high-precision controller used for controlling display, storage and analysis of the digital signals. According to the invention, the high-sensitivity sensor realizes small-magnitude acquisition of the vibration signals, digital signals are generated through a high-precision data acquisition card after the vibration signals are subjected to the anti-aliasing filtering, and subsequent process is performed to provide efficient input for the subsequent satellite vibration reduction or vibration isolation and environmental test and also realize verification of vibration reduction or vibration isolation performance. Therefore, the satellite ground micro-vibration test system, disclosed by the invention, has the advantages of satisfying demands on acquisition and analysis of micro-vibration signals and being of great importance in improving control precision and stability of a satellite platform.
Owner:SHANGHAI SATELLITE ENG INST

High-sensitivity diaphragm type photoacoustic spectrum sensor based on self-mixing

The invention relates to a high-sensitivity diaphragm type photoacoustic spectrum sensor based on self-mixing. The high-sensitivity diaphragm type photoacoustic spectrum sensor comprises a sensing light source, an excitation light source, a first coupler, a photoacoustic cavity and a signal processing circuit unit, wherein the sensing light source and the excitation light source emit laser which is led into the photoacoustic cavity through an optical fiber by the first coupler; the photoacoustic cavity comprises a ceramic bushing and a high-sensitivity diaphragm; the laser light source emits the laser to excite gas molecules to generate a photoacoustic signal and enable the high-sensitivity diaphragm to vibrate; the sensing light source serving as a detection light signal is incident into the surface of the high-sensitivity diaphragm and then is reflected back to the end face of the optical fiber; reflected light is output through the optical fiber into a cavity of the sensing light source to generate a self-mixing photoacoustic spectrum signal; the self-mixing photoacoustic spectrum signal is processed through the signal processing circuit unit, so that the vibration frequency and the amplitude of the high-sensitivity diaphragm can be obtained, and the concentration information and the pressure information of the gas can be further obtained. By the adoption of a self-mixing interferential sensing technology, the high-sensitivity diaphragm type photoacoustic spectrum sensor has the advantages that the structure is simple and reliable, and the remote distributed gas detection can be realized.
Owner:SHENZHEN KEMIN SENSOR
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