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Microbolometer infrared detector elements and methods for forming same

a microbolometer and infrared detector technology, applied in the field of infrared detectors, can solve the problems of high resistance which is difficult to match with input impedance, and achieve the effect of promoting stable atomic configuration of amorphous silicon film

Active Publication Date: 2010-06-03
DRS NETWORK & IMAGING SYST
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  • Application Information

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Benefits of technology

The patent describes a method for improving the stability and performance of microbolometer infrared detector elements by adjusting the material properties of the detector elements through the use of different precursors and compositions. By varying the resistance, thermal coefficient of resistance, electrical noise, and carrier mobility, the detector elements can be optimized for their responsivity and performance. The patent also describes the use of hydrogen dilution to improve the stability and performance of the detector elements, as well as the use of different dopants and materials to achieve desired properties. Overall, the patent provides a method for controlling and optimizing the material properties of microbolometer detector elements to improve their performance and stability.

Problems solved by technology

Low doped material results in high resistance which is difficult to match with the input impedance of ROICs operating at ambient temperature.

Method used

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  • Microbolometer infrared detector elements and methods for forming same
  • Microbolometer infrared detector elements and methods for forming same
  • Microbolometer infrared detector elements and methods for forming same

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Embodiment Construction

[0047]FIG. 1A is a diagrammatic perspective view of one embodiment of an infrared detector 1 which is capable of sensing thermal energy and of outputting electrical signals representative of a two-dimensional image of that sensed thermal energy. The infrared detector 1 includes a focal plane array 2 disposed on a substrate 11. The substrate 11 may include an integrated circuit of a type which is commonly known as a read out integrated circuit (ROIC). The ROIC reads out the thermal information gathered by the focal plane array 12.

[0048]A thermal element 17 may be optionally provided on the side of the substrate 16 opposite from the focal plane array 2, in order to serve as a form of controlled heat sink which maintains the integrated circuit substrate 11 at a substantially constant temperature which is predefined. The constant temperature prevents ambient or internally generated temperature gradients from affecting operation of the focal plane 2, and thus provides a baseline with whi...

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Abstract

Microbolometer infrared detector elements that may be formed and implemented by varying type / s of precursors used to form amorphous silicon-based microbolometer membrane material / s and / or by varying composition of the final amorphous silicon-based microbolometer membrane material / s (e.g., by adjusting alloy composition) to vary the material properties such as activation energy and carrier mobility. The amorphous silicon-based microbolometer membrane material / s materials may include varying amounts of one or more additional and optional materials, including hydrogen, fluorine, germanium, n-type dopants and p-type dopants.

Description

FIELD OF THE INVENTION[0001]This invention relates in general to infrared detectors and more particularly to microbolometer infrared detector elements and methods for forming the same.BACKGROUND OF THE INVENTION[0002]Infrared (IR) detectors are often utilized to detect fires, overheating machinery, planes, vehicles, people, and any other objects that emit thermal radiation. Infrared detectors are unaffected by ambient light conditions or particulate matter in the air such as smoke or fog. Thus, infrared detectors have potential use in night vision and when poor vision conditions exist, such as when normal vision is obscured by smoke or fog. IR detectors are also used in non-imaging applications such as radiometers, gas detectors, and other IR sensors.[0003]Infrared detectors generally operate by detecting the differences in thermal radiance of various objects in a scene. That difference is converted into an electrical signal which is then processed. Microbolometers are infrared radi...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L31/0376H01L31/18H01L21/50
CPCG01J5/02G01J5/023G01J5/20G01J5/046G01J5/04
Inventor SYLLAIOS, ALTHANASIOS J.SCHIMERT, THOMAS R.TAYLOR, MICHAEL F.
Owner DRS NETWORK & IMAGING SYST
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