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Inner tube adjustment device

A technology for adjusting devices and inner tubes, applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of low safety factor, laborious, time-consuming, etc., and achieve the effect of easy operation, high safety factor and simple adjustment process

Active Publication Date: 2020-12-18
淮安西德工业设计有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The manual adjustment process needs to be operated in a high-temperature environment, with low safety factor, time-consuming and labor-intensive

Method used

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  • Inner tube adjustment device
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] Such as figure 1 As shown, the furnace tube machine includes a heater 1, and the heater 1 is sequentially provided with an outer tube (outertube) 2, an inner tube (inner tube) 3 and a boat 4 from outside to inside, and the boat 4 is used for Carrying devices such as wafers that require heat treatment.

[0025] combine figure 1 with figure 2 As shown, the bottom position of the outer tube 2 is provided with a flange (flange) 5, the inner ring of the flange 5 is provided with an inner tube platform 6, and the inner tube 3 is fixed on a supporting ring (supporting ring) 7, and the supporting ring 7 is placed on On the inner tube platform 6, there is no any limiting device and fixing device on the inner tube platform 6, therefore, the position of the inner tube 3 is very easy to deviate.

[0026] There are many reasons for the deviation of the inner tube 3, mainly in the following two aspects: on the one hand, when the furnace tube machine is PM, the position of the inn...

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PUM

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Abstract

The technical scheme of the invention discloses an inner tube adjusting device used for adjusting the position of an inner tube of a furnace tool. The inner tube adjusting device comprises a flange, at least one group of sliding rails arranged on the edge of the flange, motors movably arranged on the corresponding sliding rails, moving shaft levers, a supporting ring sleeving the outside of the inner tube and a controller for controlling the motors to rotate, wherein each group of sliding rails include two oppositely arranged sliding rails; one end of each moving shaft lever is connected with the corresponding motor; and supporting lugs linked with the corresponding moving shaft levers are arranged on the edge of the supporting ring. By adopting the inner tube adjusting device disclosed by the technical scheme of the invention, the position of the inner tube can be adjusted at any time in the working process of a furnace tube, so that an operator does not need to adjust the position of the inner tube at high temperature; the inner tube adjusting device is simple in operation and high in safety coefficient; the manufacturing efficiency of a wafer is greatly improved; the uniformity of the wafer is improved; and the product yield is ensured.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to an inner tube adjustment device. Background technique [0002] The furnace tube machine is an important equipment in the field of semiconductor manufacturing. In the semiconductor manufacturing process, many processes that require a high temperature environment need to be completed in the furnace tube machine, such as the wafer processing process. [0003] In the process of wafer processing, the inner tube is prone to deviation, resulting in uneven distribution of reaction gas in the furnace tube, which affects the uniformity of the wafer, reduces product yield, and may even lead to product scrapping. [0004] At present, the way to solve the deviation of the inner pipe is still manual adjustment. When adjusting, it is necessary to cool down the furnace tube machine to 400°C, manually adjust the position of the inner tube with high-temperature gloves, and re-test...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67098H01L21/67259
Inventor 李天涯陈伯廷吴宗祐林宗贤
Owner 淮安西德工业设计有限公司