Tuning Method of Inductively Coupled Plasma Generation System Based on Model Predictive Control

Abstract

The invention discloses a model-predictive-control-based setting method for an inductively coupled plasma generating system. With a robust stability condition and an output steady-state error determination threshold as constraints and maximum output oscillation amount minimization under different uncertainty levels as a set objective, an optimal setting parameter is obtained automatically according to a steady-state error determination threshold and uncertainty levels of real models of different inductively coupled plasma generating systems. A nominal mathematical model of the inductively coupled plasma generating system is established; a model predictive controller is designed, a constrained cost function is constructed, and setting parameters of the model predictive controller are determined; an uncertainty level and a sensitivity function boundary value of a real transfer function model of the inductively coupled plasma generating system are determined; and with the output steady-state error determination threshold as the constraint, setting parameters of the model predictive controller satisfying the steady-state error and robust stability conditions are determined. Therefore,the time-domain output performance of the system is enhanced.

Description

technical field [0001] The invention belongs to the technical field of automatic control, and relates to a setting method of an inductively coupled plasma generation system (Inductively Coupled Plasma, ICP generation system for short) based on a model predictive control (MPC) algorithm. Background technique [0002] When a hypersonic vehicle re-enters the earth's atmosphere, the body will rub against the air violently, which will generate a plasma sheath. The plasma sheath with changing electron density will produce a series of electromagnetic effects, which will not only weaken the communication and detection signals, but also distort the characteristics of the communication system. In extreme cases, the plasma sheath will interrupt the communication between the aircraft and the outside world, resulting in " blackout” phenomenon. In order to reproduce the black barrier environment and study the influence of plasmas with different electron densities on telemetry and remote ...

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Problems solved by technology

[0004] Based on the above-mentioned purpose, the present invention provides an optimization method of an inductively coupled plasma generation system based on model predictive control, which provides a tuning method for the control of the ICP generation system to solve the uncertainty of the real model of the control of the ICP generation system The time domain output performance degradation of the ICP generation system caused by the problem

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