A nanometer measurement loading unit for nanoindenter and its measurement method
A technology of nano-indentation instrument and loading unit, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of reduced measurement efficiency, large indentation load, and reduced accuracy of film material hardness and elastic modulus measurement, achieving Improve displacement and force resolution, increase force measurement accuracy, and reduce the effect of force measurement links
Active Publication Date: 2022-02-08
长春因赛图精密仪器设备有限公司
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Problems solved by technology
[0004] The conventional indentation instrument uses the indenter to touch the surface of the sample first and then the force sensor has a force value. At this time, the indentation depth is recorded, or a correction is made to the indentation depth, and then the indentation depth is recorded. This method of recording the indentation depth method is not accurate by any means
Moreover, the existing nanoindentation instrument makes the indentation load on the surface of the film larger, generally above 1 N, and the indentation depth is deeper, so that the resolution of the load is low, and the resolution of the displacement is also low, making the film material hardness and Reduced accuracy of elastic modulus measurement
Moreover, the existing nanoindenter can only use one kind of indenter, which cannot be switched, which leads to cumbersome measurement and reduces the measurement efficiency
Method used
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[0054] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.
[0055] The invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth again, but rather these embodiments are provided so that this disclosure will be thorough and complete. In the drawings, the size and relative sizes of structures and regions may be exaggerated for clarity.
[0056] Such as Figure 1-5 As shown, the present invention provides a nanoscale measurement loading unit for a nanoindentation instrument, including: a flexible hinge 100, which is provided with a piezoelectric ceramic 110 inside, and adopts a structure combining a flexible hinge and a piezoelectric ceramic. While piezoelectric ceramics obtain high-resolution signals, linear actuators can output nanometer-level displacements. The response to ...
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The invention discloses a nano-scale measurement loading unit for a nano-indentation instrument, comprising: a flexible hinge; a first column and a second column, which are arranged on both sides of the bottom surface of the flexible hinge; The first column is fixedly connected with the second column; the first circular through hole is arranged in the center of the beam; the slider is axially fixed on the inner side of the first column; The groove is slidably connected with the slider; the reference frame is provided with a second circular through hole at the outer end of its short side; the pressure sleeve is coaxially arranged under the second circular through hole; the soft pressure ring, It is circular and coaxially fixed at one end of the pressure sleeve away from the reference frame; the reading head is fixed on one side of the short side of the reference frame; the indenter is fixed at the center of the bottom surface of the flexible hinge at one end connected, and the other end coaxially extends into the pressure sleeve. The invention discloses a measurement method for a nanoscale measurement loading unit of a nanoindentation instrument.
Description
technical field [0001] The present invention relates to the technical field of nano-indentation instruments, and more specifically, the present invention relates to a nano-scale measurement loading unit for nano-indentation instruments and a measurement method thereof. Background technique [0002] Nanoindentation instrument is mainly used in universities, scientific research institutions or quality inspection institutions, etc., and is mainly used for testing the mechanical properties of thin film materials. Due to the force sensor that can measure tiny forces and the high-resolution displacement sensor, the nanoindenter can be used to measure the surface characteristics of almost all materials, especially for measuring the hardness and elastic modulus of the film on the surface of the material. [0003] The pressure head of the measurement loading unit starts from contacting the surface of the film sample, and increases the force value according to the given force loading ...
Claims
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IPC IPC(8): G01N3/44G01N3/02
CPCG01N3/44G01N3/02G01N2203/0019G01N2203/0082G01N2203/0641G01N2203/0676G01N2203/0682G01N2203/0282
Inventor 路东辉赵宏宇姜绍东
Owner 长春因赛图精密仪器设备有限公司