Autoclave device capable of removing bubbles in multiple stages
A technology of autoclave and power supply device, which is applied to pressure vessels used in chemical processes, lamination, lamination auxiliary operations, etc. It can solve problems such as low efficiency and frequent bubbles, so as to reduce the sense of burden and save products. Effects of cost, simplification, and components
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Embodiment 1
[0036] In the autoclave device composed of an upper body 100, a lower body 200, a connector 300 that fixes the upper body and the lower body, and a product placement portion for placing substrate products, the product placement portions are divided into first The product placement portion 410 and the second product placement portion 420 are composed of multiple stages, and are located on both sides of the first product placement portion 410 contacting the lower sides of both sides of the second product placement portion 420 and the lower portion of the upper body 100 Springs 412s, 422s or cylinders 412c, 422c are respectively formed on both sides of the second product mounting portion 420 that are in surface contact to raise the first and second product mounting portions 410, 420.
[0037] In the autoclave device composed of an upper body 100, a lower body 200, a connector 300 that fixes the upper body and the lower body, and a product placement portion for placing substrate produ...
Embodiment 2
[0039] In the autoclave device composed of an upper body 100, a lower body 200, a connector 300 that fixes the upper body and the lower body, and a product placement portion for placing substrate products, the product placement portions are respectively divided into first products The mounting portion 410 and the second product mounting portion 420 are configured in multiple stages, and inside the mounting portion 421 of the second product mounting portion 420, a heater 423 and a temperature control sensor are respectively formed. On one side of the mounting portion 420, a second power supply device 427 for supplying power to the heater 423 and the temperature control sensor of the second product mounting portion 420 is formed.
Embodiment 3
[0041] In an autoclave device composed of an upper body 100, a lower body 200, a connector 300 that fixes the upper body and the lower body, and a product placement portion for placing substrate products, the product placement portions are respectively divided into first products The mounting portion 410 and the second product mounting portion 420 are configured in multiple stages. Between the lower body 200 and the first product mounting portion 410, the heater 230 and the temperature control sensor are connected to a power source.
[0042] The first power supply device 417 or the second power supply device 427 that supplies power to the heaters 413, 423 composed of the mounting portions 411, 421 of the first product mounting portion 410 or the second product mounting portion 420 can be used Contact type power supply device or cable drag chain.
[0043] Between the lower body 200 and the first product mounting portion 410, one or more multiple brackets 210 are formed to prevent th...
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