Fluid control device

Abstract

The invention is to provide a fluid control device which, while achieving greater compactness, internally accommodates a member for detecting abnormalities in the fluid control device. Further, to facilitate externally verifying the result of irregularity detection in the fluid control device. This fluid control device 1 is provided with an information processing module 5 provided inside the device, a valve body 11 provided with a flow path, an actuator body 12 fixed to the valve body 11, a hollow casing 13 fixed to the actuator body 12 and having a through-hole 133d formed in the side surface, a piston 126 provided inside of the actuator body 12 and comprising a drive pressure introduction path 126b formed internally that communicates with a drive pressure introduction chamber S2, and anintroduction pipe 21 for introducing drive pressure, with one end inserted into the drive pressure introduction path 126b and the other end drawn from the through-hole 133d in the casing 13 to the outside.

Description

Technical field [0001] The present invention relates to a fluid control device that houses a sensor inside and an information processing module that executes processing based on data obtained by the sensor. Background technique [0002] Conventionally, in the film formation process of forming a thin film on the surface of a semiconductor wafer, the miniaturization of the thin film is required. In recent years, a film formation such as ALD (Atomic Layer Deposition), which forms a thin film with a thickness at the atomic or molecular level, has been used. method. [0003] However, the miniaturization of such a thin film requires a high-frequency opening and closing operation that has hitherto been higher for fluid control equipment, and the load may easily cause fluid leakage or the like. Therefore, the demand for a technology capable of easily detecting fluid leakage in a fluid control device has increased. [0004] In addition, it is possible to not only easily detect leakage, but ...

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Problems solved by technology

[0003] However, the miniaturization of such thin films requires more frequent opening and closing operations than ever before for fluid control devices, and this load may easily cause fluid leakage, etc.

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