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Automatic bubble cleaning system

A bubble cleaning, automatic technology, applied in cleaning methods and utensils, cleaning methods using liquids, chemical instruments and methods, etc., can solve the problems of reduced production efficiency, long wiping time, time-consuming and laborious, etc., to achieve production efficiency improvement, cleaning The effect of time reduction and ease of use

Pending Publication Date: 2019-11-12
富乐德科技发展(大连)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the complex structure of the grinding head, and the material is polyethylene, it is difficult to wipe at first, and a little negligence will cause damage to the product. In addition, the wiping time is long, and the effect is not good, time-consuming and laborious, and the production efficiency on site is greatly reduced.

Method used

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  • Automatic bubble cleaning system
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Examples

Experimental program
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Effect test

Embodiment 1

[0028] Such as Figure 1-9 As shown, the present embodiment provides an automatic air bubble cleaning system, comprising: an upper tank body and a lower tank body connected together, one side of the upper tank body is an inclined surface, and a baffle plate and an upper pull-up are installed on the inclined surface Plate; cleaning equipment and overflow device are provided in the lower tank body, the cleaning equipment includes air outlet pipe, cleaning plate, support plate, multiple rows of cleaning holes are arranged on the cleaning plate, and multiple supports are distributed on the bottom surface of the cleaning plate There are multiple passage holes on the support plate, and each row of passage holes on each support plate is on a horizontal line; multiple air outlet pipes are located in the corresponding passage holes, and the bottom surface of each air outlet pipe is provided with multiple air outlet holes The overflow device includes an overflow side plate and an overfl...

Embodiment 2

[0030] This embodiment provides a working method of an automatic air bubble cleaning system, and the specific steps of the method are as follows:

[0031] S1: Stand the four outriggers at the bottom of the lower tank on a flat ground;

[0032] S2: Connect the water inlet pipe to the tap water pipe to ensure that the water source of the tank is sufficient to achieve the effect of overflowing and continuous water;

[0033] S3: the air intake pipe is connected to the air source device, and the air intake pipe is provided with a regulating valve a;

[0034] S4: The PLC controller turns on the exhaust fan to ensure that the odor gas in the tank can flow away effectively;

[0035] S5: The PLC controller opens the regulating valve c, injects water into the lower tank body, and after the water in the lower tank body is filled to the height of the overflow port, the excess water flows out from the overflow port, flows through the overflow channel, and drains channel, which eventually...

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Abstract

The invention discloses an automatic bubble cleaning system. The automatic bubble cleaning system comprises an upper tank body and a lower tank body which communicate with each other; a cleaning device is arranged in the lower tank body; the cleaning device comprises a plurality of air outlet pipes, a cleaning plate and a plurality of support plate; the cleaning plate is provided with a pluralityof rows of cleaning holes; the plurality of support plates are distributed on the bottom surface of the cleaning plate; the support plates are provided with through holes; the plurality of air outletpipes are located in the corresponding through holes; and the bottom surface of each air outlet pipe is provided with a plurality of air outlets. Through the system, large particles on components canbe removed, the removal effect is good, the cleaning time is greatly shortened, application is convenient, and the on-site production efficiency is greatly improved.

Description

technical field [0001] The invention relates to a cleaning device, in particular to an automatic bubble cleaning system. Background technique [0002] At present, in the maintenance and regeneration process of the semiconductor chemical mechanical grinding head, since there are particles that are difficult to remove on the carrier of the grinding head, ultrasonic treatment is used to remove the particles of the parts. Since ultrasonic waves can only remove tiny particles on the surface of parts, it is difficult to remove larger particles. Therefore, it is necessary to manually wipe the grinding head carrier with isopropanol, and rinse with water for a period of time after wiping. Because the structure of the grinding head is complicated and the material is polyethylene, it is difficult to wipe at first, and a little negligence will cause damage to the product. In addition, the wiping time is long, and the effect is not good, time-consuming and laborious, and the production e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/10B08B13/00
CPCB08B3/10B08B13/00
Inventor 陈智慧贺贤汉李泓波张正伟朱光宇王松朋
Owner 富乐德科技发展(大连)有限公司
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