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Gas sensing method and device

A technology of gas and sensor pixels, which is applied in the direction of measuring devices, analyzing gas mixtures, and structural details of gas analyzers, and can solve problems such as inability to sense inert gases

Active Publication Date: 2019-11-22
应美盛公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, chemistor-based gas sensors cannot sense noble gases such as carbon dioxide or nitrogen due to the reaction limitation of the metal-oxide-semiconductor (MOS) structure

Method used

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Embodiment Construction

[0019] In at least some embodiments, the present disclosure recognizes and addresses the problem of detecting reactive as well as noble and / or other non-reactive gases. The disclosed gas sensors use thermal conductivity sensing methods in addition to chemi-resistor based sensing methods in order to sense a wider range of gases using a single gas sensing platform. The disclosed gas sensors combine chemi-resistor sensing and thermal conductivity sensing in the same device, thereby improving gas sensing species range while reducing the amount of gas sensor devices and / or other associated equipment.

[0020] When compared to conventional techniques, the gas sensor of the present disclosure can detect multiple gases using a single sensor device, with the attendant lower cost and complexity otherwise achieved by using multiple sensor devices. Furthermore, the gas sensors of the present disclosure can be configured to specifically utilize thermal conductivity sensing in the presence ...

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Abstract

The present invention relates to systems and methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Nonprovisional Patent Application Serial No. 15 / 484,864, filed April 11, 2017, entitled "Gas Sensing Method and Apparatus," the entire contents of which are hereby incorporated by reference. Background technique [0003] Certain gas sensors utilize a physical or chemical change in a chemical sensing material (eg, a chemi-resistive material) in the presence of a gas to determine the concentration of the gas in the surrounding environment. However, chemistor-based gas sensors cannot sense noble gases such as carbon dioxide or nitrogen due to the reaction limitation of the metal-oxide-semiconductor (MOS) structure. Therefore, it is desired to realize a gas sensor device capable of detecting more kinds of gases. Contents of the invention [0004] The following presents a simplified summary of one or more embodiments of the application in order to provide a basic understanding of the...

Claims

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Application Information

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IPC IPC(8): G01N27/12G01N27/18G01N33/00
CPCG01N27/123G01N27/128G01N27/18G01N33/004G01N33/0073G01N27/04
Inventor 刘方彼得·哈特韦尔马汀·林杨玉石
Owner 应美盛公司