Reset sample pile and sample resetting method

A reset method and sample technology, applied in the direction of discharge tubes, electrical components, circuits, etc., can solve problems such as the inability to realize the reset function, and achieve the effect of satisfying repeated observations

Active Publication Date: 2019-12-03
CHINA PETROLEUM & CHEM CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the photo and position of the sample are changed every time the sample is re-inserted, this positioning function cannot realize the above-mentioned reset function

Method used

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  • Reset sample pile and sample resetting method
  • Reset sample pile and sample resetting method
  • Reset sample pile and sample resetting method

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Embodiment Construction

[0037] The present invention will be further described below in conjunction with accompanying drawing.

[0038] Such as figure 1 As shown, the sample resetting method according to the present invention is shown, comprising the following steps:

[0039] S1. Fix the sample and two positioning columns on the table of the sample pile;

[0040] S2. Fix the sample post carrying the sample and the positioning column on the sample stage of the scanning electron microscope, use the scanning electron microscope to observe and analyze the micro-area of ​​the sample, and record the coordinates (x, y) of the sample micro-area observed and analyzed and The coordinates (x a ,y a ) and (x b ,y b );

[0041] S3, when the sample is observed and analyzed again, the sample pile carrying the sample and the positioning column is fixed on the sample stage of the scanning electron microscope again, and the new coordinates (x a ',y a ') and (x b ',y b ');

[0042] S4, according to the plane...

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Abstract

The invention discloses a sample resetting method which is used for scanning electron microscope analysis and comprises the following steps of: fixing a sample and two positioning columns on a table board of a sample pile; recording the coordinates of the observed and analyzed sample micro-area and the coordinates of central mark points of the top surfaces of the two positioning columns; when thesample is observed and analyzed again, obtaining new coordinates of the center mark points of the top surfaces of the two positioning columns; acquiring a new coordinate of the observed and analyzed sample micro-area; and resetting a scanning electron microscope to the observed and analyzed sample micro-area according to the new coordinates of the observed and analyzed sample micro-area. Accordingto the sample resetting method provided by the invention, the sample can be rapidly and accurately reset to an original observation visual field, and the repeated observation requirements under certain experiment conditions are met.

Description

technical field [0001] The invention relates to the technical field of sample detection, in particular to a resettable sample pile and a sample reset method. Background technique [0002] Scanning electron microscope is an instrument for microscopic observation and analysis of the surface morphology and composition characteristics of solid materials. The sample is usually glued to the sample post and then fixed on the sample stage of the SEM. By controlling the mechanical motor of the scanning electron microscope to move the sample stage, the microscopic features of different regions of the sample can be observed. [0003] In some research work, it is necessary to put the sample under the scanning electron microscope several times for repeated observation, which requires finding the last observation position. Although the scanning electron microscope can record and reset the three-dimensional coordinates of each observation position, when the sample is fixed on the sample ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/26
CPCH01J37/20H01J37/26
Inventor 张文涛鲍芳张庆珍刘伟新俞凌杰李志明
Owner CHINA PETROLEUM & CHEM CORP
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