Bidirectional driving micro-mirror chip and manufacturing method thereof
A two-way drive and micro-mirror technology, applied in optical components, optics, instruments, etc., can solve the problem of not being able to form a two-way drive structure, and achieve the effect of excellent micro-mirror scanning effect.
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[0039] The specific embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings of the specification.
[0040] The present invention designs a bidirectional driving micromirror chip. In practical applications, it specifically includes a substrate 1, a mirror support 2, a rotating shaft 3, two sets of lower driving devices, and at least two sets of upper driving devices. The substrate 1 is SOI silicon. A ring structure made of a sheet of material, and the various parts of the substrate 1 are coplanar; the opposite sides of the mirror support 2 are respectively connected to the inner side of the ring structure of the substrate 1 through the rotating shaft 3 and the mirror support 2 is The straight line where the shaft 3 is located is the shaft freely rotating.
[0041] The two sets of lower driving devices respectively correspond to the opposite sides of the mirror support 2 on both sides of the line where the shaft 3 i...
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