A method for adjusting the azimuth angle of grating engraver

Abstract

The application discloses a method for adjusting the azimuth angle of a grating nicking tool. The method comprises the steps: engraving a groove in a substrate by using a grating nicking tool; carrying out scanning on the groove by using a morphology scanner to obtain a sectional drawing of the groove; calculating a first raised area at a first raised part adjacent to the sunken part of the grooveand a second raised area at a second raised part adjacent to the sunken part of the groove according to the sectional drawing; acquiring a current azimuth angle of the grating nicking tool accordingto a relation table between the first raised area, the second raised area, the raised area and the azimuth angle of the grating nicking tool; determining whether the current azimuth angle meets the azimuth angle requirement of the grating nicking tool; and if not, adjusting the azimuth angle of the grating nicking tool. According to the invention, the current azimuth angle of the grating nicking tool is quantitatively obtained through the first raised area, the second raised area and the relation table and the azimuth angle of the grating nicking tool is adjusted according to the current azimuth angle, so that the judgment and adjustment accuracy of the azimuth angle of the grating nicking tool is improved and the adjustment efficiency of the azimuth angle of the grating nicking tool is enhanced.

Description

technical field [0001] The present application relates to the technical field of grating production, and more specifically, to a method for adjusting the azimuth angle of a grating cutter. Background technique [0002] In the grating production process, it is often necessary to use a grating cutter to extrude and polish the film layer on the grating substrate coated with a metal film layer to obtain a grating. The structural parameters and adjustment parameters of the grating cutter itself will affect the grating. The groove shape will affect the performance index of the grating. Therefore, it is necessary to judge and adjust the above parameters to reduce the impact on the grating. Among them, the adjustment parameters of the grating cutter mainly include azimuth angle, orientation angle and pitch angle, and the adjustment accuracy of these angles will directly affect the quality of the grating. [0003] At present, for the azimuth angle of the grating cutter, it is genera...

AI Technical Summary

Problems solved by technology

In the above process, since it is artificially determined whether the azimuth angle meets the requirements through stereotyped observation through a microscope, there will inevitably be observation errors, which will reduce the accuracy of the azimuth angle judgment of the grating cutter. Correspondingly, it may Will reduce the azimuth accuracy of the adjusted grating cutter, which in turn will reduce the quality of the final prepared grating

In addition, since the determination of the azimuth angle is inaccurate, it is necessary to repeatedly perform the above-mentioned steps of scribing, judging and adjusting, so the efficiency of adjusting the azimuth angle of the grating cutter will be reduced

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