Graphene thin film reel-to-reel production device and method

A graphene film roll, graphene film technology, applied in the direction of graphene, nano-carbon, metal material coating process, etc., can solve the impossible realization of graphene product customization, in-situ online monitoring of the growth process, graphene Evaluation of film quality and regulation of hysteresis and other issues

Pending Publication Date: 2019-12-31
PEKING UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the roll-to-roll dynamic growth of graphene film coils is hundreds to thousands of meters long, so the entire coil product growth process takes a long time, which brings serious hysteresis to the evaluation and control of graphene film quality.
In the existing technology, the m

Method used

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  • Graphene thin film reel-to-reel production device and method
  • Graphene thin film reel-to-reel production device and method
  • Graphene thin film reel-to-reel production device and method

Examples

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Embodiment Construction

[0055] Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus their detailed descriptions will be omitted.

[0056]Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification only for convenience, for example, according to the drawings Directions for the example described. It will be appreciated that if the illustrated device is turned over so that it is upside down, then elements ...

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Abstract

The invention provides a graphene thin film reel-to-reel production device and method. The device comprises a vacuum cavity, a vacuum pump assembly and a process gas introducing assembly, and furthercomprises at least one monitoring assembly and a parameter control assembly. The vacuum cavity comprises an unreeling cavity, a growing cavity and a reeling cavity which sequentially communicate. Onemonitoring assembly is connected to the growing cavity and used for obtaining first representation parameters of a graphene thin film located in the growing cavity and comparing the first representation parameters with a first set representation parameter to obtain a first comparison result. The parameter control assembly is connected to the monitoring assemblies and used for responding to the first comparison result and adjusting all process gas introduction amounts and ratio and/or the temperature of the growing cavity and/or the movement speed of a growing substrate and/or the pressure intensity in the growing cavity so that the first representation parameters are equal to the first set representation parameter.

Description

technical field [0001] The present invention generally relates to the technical field of graphene film production, in particular, to a roll-to-roll production device and method for graphene film. Background technique [0002] Graphene is a new type of carbon material with a two-dimensional honeycomb structure formed by stacking a single layer of carbon atoms, with ultra-high electron mobility (~105cm 2 V -1 the s -1 ), good thermal conductivity (~5000W m -1 K -1 ), high light transmittance (97.7%), excellent mechanical properties (~1.1Tpa) and good flexibility. These excellent properties make graphene have broad application prospects in many fields, such as photodetection, transparent conductive films, solar cells, etc. The key to the practical application of graphene is to realize the large-scale preparation of graphene. Among the many preparation methods of graphene, roll-to-roll dynamic growth can realize large-scale and large-scale preparation of graphene films, a...

Claims

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Application Information

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IPC IPC(8): C23C16/26C23C16/54C01B32/186
CPCC01B32/186C23C16/26C23C16/545
Inventor 彭海琳杨倩董广成查冰杰刘忠范
Owner PEKING UNIV
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