Graphene thin film reel-to-reel production device and method

Abstract

The invention provides a graphene thin film reel-to-reel production device and method. The device comprises a vacuum cavity, a vacuum pump assembly and a process gas introducing assembly, and furthercomprises at least one monitoring assembly and a parameter control assembly. The vacuum cavity comprises an unreeling cavity, a growing cavity and a reeling cavity which sequentially communicate. Onemonitoring assembly is connected to the growing cavity and used for obtaining first representation parameters of a graphene thin film located in the growing cavity and comparing the first representation parameters with a first set representation parameter to obtain a first comparison result. The parameter control assembly is connected to the monitoring assemblies and used for responding to the first comparison result and adjusting all process gas introduction amounts and ratio and / or the temperature of the growing cavity and / or the movement speed of a growing substrate and / or the pressure intensity in the growing cavity so that the first representation parameters are equal to the first set representation parameter.

Description

technical field [0001] The present invention generally relates to the technical field of graphene film production, in particular, to a roll-to-roll production device and method for graphene film. Background technique [0002] Graphene is a new type of carbon material with a two-dimensional honeycomb structure formed by stacking a single layer of carbon atoms, with ultra-high electron mobility (~105cm 2 V -1 the s -1 ), good thermal conductivity (~5000W m -1 K -1 ), high light transmittance (97.7%), excellent mechanical properties (~1.1Tpa) and good flexibility. These excellent properties make graphene have broad application prospects in many fields, such as photodetection, transparent conductive films, solar cells, etc. The key to the practical application of graphene is to realize the large-scale preparation of graphene. Among the many preparation methods of graphene, roll-to-roll dynamic growth can realize large-scale and large-scale preparation of graphene films, a...

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Problems solved by technology

[0003] However, the roll-to-roll dynamic growth of graphene film coils is hundreds to thousands of meters long, so the entire coil product growth process takes a long time, which brings serious hysteresis to the evaluation and control of graphene film quality.

In the existing technology, the monitoring of graphene film and coil products is carried out after taking it out of the growth equipment, which requires a long cooling process, and cannot realize in-situ online monitoring of the growth process, and it is even more impossible to realize the customization of graphene products.

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