Laser SE structure pattern manufacturing method, device and equipment and storage medium

Abstract

The invention discloses a method for manufacturing a laser SE structure on the surface of a silicon wafer, which comprises the following steps: a laser moving track for manufacturing a laser SE structure pattern on the surface of a silicon wafer is preset, wherein phosphorus source diffusion doping is carried out on the surface of the silicon wafer by adopting a tubular diffusion technology; and the movement of laser irradiated on the surface of the silicon wafer is controlled according to the laser moving track to prepare a fine grid line pattern, and the power of the laser is increased alongwith the decrease of the distance between the laser irradiation position and the center of the silicon wafer and decreased along with the increase of the distance between the laser irradiation position and the center of the silicon wafer. When the SE structure is formed on the surface of the silicon wafer, laser with variable power is adopted for irradiation, so that the uniformity of the squareresistance of the SE structure corresponding to the same fine grid line is enhanced, the conductivity of the fine grid line is improved, and the working performance of the silicon wafer is improved. The invention further provides a device and equipment for manufacturing a laser SE structure on the surface of a silicon wafer and a computer readable storage medium.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a method, device, equipment and computer-readable storage medium for fabricating a laser SE structure on the surface of a silicon wafer. Background technique [0002] A solar cell is a device that directly converts light energy into electrical energy through the photoelectric effect or photochemical effect. As long as it is illuminated by light, it can output voltage and current instantly. In physics, it is called solar photovoltaic (Photovoltaic, photo light, voltaics electricity, abbreviated as PV), referred to as photovoltaic. Thin-film solar cells based on the photoelectric effect are the mainstream and have been widely used. [0003] After the solar cells receive light, the current needs to be derived through the thin grid lines distributed on the surface of the cells to output the electric energy generated by the cells. The cell is obtained by doping a certain amount...

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a manufacturing method, device, equipment and computer-readable storage medium of a laser SE structure on the surface of a silicon wafer, which solves the problem of uneven square resistance at the position where the fine grid lines are set on the surface of the silicon wafer

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