Device and method for monitoring two-dimensional distribution of charged particle beams
A technology of charged particle beam and two-dimensional distribution, which is used in measurement devices, radiation measurement, X/γ/cosmic radiation measurement, etc., which can solve the problem that the fluorescent screen monitoring device cannot accurately give the beam current intensity information and cannot truly respond. The real position of the charged particle beam, the reliability and applicability of the dependent calculation algorithm, etc., to achieve the effect of suppressing the escape of secondary electrons, comprehensive test results, and improving monitoring accuracy
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[0023] The present invention will be described in detail below in conjunction with the accompanying drawings. However, it should be understood that the accompanying drawings are provided only for better understanding of the present invention, and they should not be construed as limiting the present invention. In the description of the present invention, it should be understood that the terms first and second used are only for the purpose of description, and should not be understood as indicating or implying relative importance.
[0024] This embodiment discloses a charged particle beam two-dimensional distribution monitoring device, such as figure 1 As shown, it includes: a collimation plate 1, a Faraday cage array plate 2, a measurement plate 3 and a data processing module arranged in sequence. The collimation plate 1 faces the incident direction of the charged particle beam and is used to collimate the passing charged particle beam; the Faraday cage array plate 2 is provide...
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