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Data processing method, data processing device and computer readable recording medium

A technology for data processing and data extraction, which is applied to data processing devices, computer-readable recording media, and digital data processing fields, and can solve problems such as inability to accurately detect abnormalities.

Active Publication Date: 2020-03-27
DAINIPPON SCREEN MTG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, if the elapse of time is not taken into account when judging the abnormality, the abnormality cannot be detected with sufficient accuracy.

Method used

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  • Data processing method, data processing device and computer readable recording medium
  • Data processing method, data processing device and computer readable recording medium
  • Data processing method, data processing device and computer readable recording medium

Examples

Experimental program
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Embodiment Construction

[0080] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0081]

[0082] figure 1 It is a block diagram showing the overall configuration of a data processing system (data processing system for a substrate processing apparatus) according to an embodiment of the present invention. The data processing system includes a data processing device 100 and a substrate processing device 200 . The data processing apparatus 100 and the substrate processing apparatus 200 are connected to each other through a communication line 300 .

[0083] The data processing device 100 functionally includes a unit processing data selection unit 110 , an evaluation value calculation unit 120 , an evaluation value distribution creation unit 130 , an evaluation value distribution update unit 140 , an abnormality determination unit 150 , and a data storage unit 160 . The unit processing data selection unit 110 selects two or more unit processing data...

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PUM

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Abstract

The invention discloses a data processing method, a data processing device and a computer readable recording medium. The data processing method that processes a plurality of unit processing data (eachunit processing data include plural types of time-series data) includes an evaluation value distribution utilization step, in which processing that uses evaluation value distributions showing degreesof each value of evaluation values obtained by evaluating each time-series datum is carried out (for example, a step in which each time-series datum is compared with reference data and scoring that quantifies results obtained thereby as the evaluation values is carried out, and a step in which judgment of abnormality degrees is carried out using the evaluation value distributions based on resultsof the scoring); and an evaluation value distribution update step, in which the evaluation value distributions are updated.

Description

technical field [0001] The present invention relates to a digital data processing, a data processing device and a computer-readable recording medium, in particular to a method for processing time series data. Background technique [0002] As a method of detecting an abnormality of a device or device, a method is known in which a sensor (sensor) or the like is used to measure a physical quantity (such as length, angle, time, speed, force, pressure, voltage, Current, temperature, flow, etc.), and analyze the time series data obtained by arranging the measurement results in the order of occurrence. When a facility or device performs the same operation under the same conditions, the time-series data will change in the same manner unless there is an abnormality. Therefore, by comparing a plurality of time-series data that change in the same way to detect abnormal time-series data, and analyzing the abnormal time-series data, it is possible to specify the location where the abnor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B23/02G01D21/02G06N3/08
CPCG05B23/0221G05B23/0235G01D21/02G06N3/08G06F17/18Y02P90/02G06F16/904G01R31/31725G01R31/2831
Inventor 犹原英司山本麻友美
Owner DAINIPPON SCREEN MTG CO LTD