Air floating main shaft rotation error detection and compensation device and method based on reflection principle

Abstract

The invention discloses an air floating main shaft rotation error detection and compensation device and method based on a reflection principle. At present, the rotation error of an air bearing is mainly compensated by adopting a weight type or a spring type, and real-time detection and accurate compensation cannot be realized. The air floating main shaft rotation error detection and compensation device comprises air inlet pressure control valves, auxiliary measurement reflection tables, laser emitters, a radial air bearing and measurement sensitive elements; and when a laser emitted by each laser emitter is not reflected at the preset position on the corresponding measurement sensitive element, a controller judges that an air floating main shaft has a rotation motion error, records the number of each measurement sensitive element which does not receive the corresponding laser at the preset position, controls the corresponding air inlet pressure control valve to adjust the air inlet pressure, and further adjusts the air pressure of an air inlet area corresponding to the radial air floating bearing to compensate the motion precision of the air floating main shaft in the correspondingdirection. According to the air floating main shaft rotation error detection and compensation device and method, the optical measurement principle is adopted, and the rotation error of the main shaftcan be detected in real time and in place, so that the detection is more accurate, and the compensation is more accurate.

Description

technical field [0001] The invention belongs to the technical field of precision machining, and in particular relates to an air-floating spindle rotary motion error compensation device based on the reflection principle and a method for detecting and compensating the air-floating spindle rotary error. Background technique [0002] With the development of science and technology, air bearings have the advantages of extremely small friction coefficient, high rotation accuracy and no pollution, and have been more and more widely used in precision machinery and measuring instruments. Air-bearing static pressure bearing embodies high-speed, high-efficiency, high-precision processing performance, and is one of the main development directions of high-precision machine tool spindles. [0003] During the working process of the air bearing spindle, the feed of the cutter head, the cutting force and the high-speed rotation of the spindle will easily lead to the increase of the rotation e...

AI Technical Summary

Problems solved by technology

However, the connection between the loader and the bearing in this compensation method is generally a rigid connection, the loading force cannot be accurately guaranteed, and real-time detection and accurate error compensation cannot be realized.

Images