Air bearing spindle rotation error detection and compensation device and method based on reflection principle

Abstract

The invention discloses an air-floating spindle rotation error detection and compensation device and method based on the principle of reflection. At present, the rotation error of air bearings is mainly compensated by weight type or spring type, which cannot realize real-time detection and accurate compensation. The invention includes an intake pressure control valve, an auxiliary measurement reflection table, a laser emitter, a radial air bearing and a measurement sensitive element; when the laser reflection emitted by the laser emitter is not at a predetermined position on the corresponding measurement sensitive element, the controller Determine the rotary motion error of the air bearing spindle, record the number of each measurement sensitive element that has not received the laser at the predetermined position, and control the corresponding intake pressure control valves to adjust the intake pressure, and then adjust the corresponding intake area of ​​the radial air bearing The gas pressure compensates the motion accuracy of the air bearing spindle in the corresponding direction. The invention adopts the principle of optical measurement, and can realize real-time and on-site detection of the rotation error of the main shaft, with more accurate detection and more accurate compensation.

Description

technical field [0001] The invention belongs to the technical field of precision machining, and in particular relates to an air-floating spindle rotary motion error compensation device based on the reflection principle and a method for detecting and compensating the air-floating spindle rotary error. Background technique [0002] With the development of science and technology, air bearings have the advantages of extremely small friction coefficient, high rotation accuracy and no pollution, and have been more and more widely used in precision machinery and measuring instruments. Air-bearing static pressure bearing embodies high-speed, high-efficiency, high-precision processing performance, and is one of the main development directions of high-precision machine tool spindles. [0003] During the working process of the air bearing spindle, the feed of the cutter head, the cutting force and the high-speed rotation of the spindle will easily lead to the increase of the rotation e...

AI Technical Summary

Problems solved by technology

However, the connection between the loader and the bearing in this compensation method is generally a rigid connection, the loading force cannot be accurately guaranteed, and real-time detection and accurate error compensation cannot be realized.

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