Monitoring method and monitoring system for testing target rolling deformation
A technology of rolling deformation and monitoring system, applied in metal rolling, metal rolling, manufacturing tools and other directions, can solve the problems of poor monitoring accuracy of target deformation degree, excessive deformation degree, inability to meet the process, etc. Monitoring the effect of precision
Active Publication Date: 2021-05-11
合肥江丰电子材料有限公司
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Problems solved by technology
[0004] During the rolling process, the degree of deformation of the target needs to be monitored. If the degree of deformation of the target is too large or too small, it cannot meet the needs of the process.
[0005] However, the existing monitoring accuracy of the degree of deformation of the target is poor
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Embodiment Construction
[0027] As described in the background art, the performance of the monitoring method for target rolling deformation formed in the prior art is poor.
[0028] Existing target materials are usually rolled using a rolling mill. Specifically, the rolling mill includes an upper roll and a lower roll, and the upper roll and the lower roll rotate relative to each other to roll the target material. At present, the deformation of the target in the thickness direction is controlled by the single rolling drop and rolling times of the upper roll and the lower roll.
[0029] However, during the rolling process of the target material, there is no suitable method for monitoring the deformation of each layer of the target material along the transverse extension direction, resulting in poor accuracy of monitoring the deformation of the target material.
[0030] On this basis, the present invention provides a monitoring method for testing target rolling deformation, please refer to figure 1 , i...
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A monitoring method and monitoring system for testing target rolling deformation, the method includes: providing a rolling mill, the rolling mill includes an upper roll and a lower roll, and there is a gap between the upper roll and the lower roll; providing a test target, the test target includes a marked side , a pre-transmission axis is provided on the marking side, and the pre-transmission axis is perpendicular to the thickness direction of the test target; a number of discrete marking points are marked on the marking side along the thickness direction of the test target; and then the test target is transported into the gap, And the test target is rolled by the rotation of the upper roll and the lower roll; in the process of rolling the test target, the moving speed of several marking points when passing through the gap is tested; after the test target is rolled, measure The lateral distance of adjacent marking points along the pre-transport axis and the longitudinal distance along the thickness direction of the test target. The monitoring method can improve the monitoring accuracy of the rolling deformation of the test target.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a monitoring method and a monitoring system for testing target rolling deformation. Background technique [0002] Plastic deformation is a physical phenomenon in which a material deforms under certain conditions under the action of an external force, and the object cannot return to its original shape when the applied external force is removed or disappears. [0003] There are many plastic deformation processes, the common ones are free forging, die forging, sheet metal stamping, extrusion, drawing and rolling. Among them, the rolling process is widely used in the plastic deformation processing of metal targets. [0004] During the rolling process, the degree of deformation of the target needs to be monitored. If the degree of deformation of the target is too large or too small, it cannot meet the needs of the process. [0005] However, the existing monitoring accuracy...
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IPC IPC(8): B21B38/00B21C51/00
CPCB21B38/00B21C51/00
Inventor 姚力军潘杰王学泽丁向前
Owner 合肥江丰电子材料有限公司