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A Sensitivity Enhancement Method Based on Moiré Fringe Interferometric Phase Shift

A moiré fringe and interference phase shift technology, which is applied in the direction of instruments, measuring devices, and optical devices, can solve the problems of insufficient sensitivity of interference phase shift and small offset of optical path difference, so as to improve sensitivity, improve sensitivity, good compatibility

Active Publication Date: 2021-09-07
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is: for the fixed delay interferometer and the asymmetric space heterodyne interferometer, the optical path difference offset is small, and the interferometric phase shift sensitivity is not enough, a moiré-based interferometric phase shift is proposed Sensitivity Enhancement Method

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  • A Sensitivity Enhancement Method Based on Moiré Fringe Interferometric Phase Shift
  • A Sensitivity Enhancement Method Based on Moiré Fringe Interferometric Phase Shift
  • A Sensitivity Enhancement Method Based on Moiré Fringe Interferometric Phase Shift

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Embodiment 1

[0030] Embodiment 1 of the present invention is a method for enhancing the sensitivity of an interference phase shift of a fixed-delay interference instrument by using Moiré fringes.

[0031] like figure 1 As shown, the interference fringe light field 1 output by the fixed-delay interferometer is generated by a laser with a wavelength of 633nm. The aperture of the interference fringe light field is 25mm. Period is 260μm, such as figure 2 As shown, according to the formula It can be obtained that the divergence angle of the interference fringe light field is about 1.2 mrad, which is similar to a beam of parallel light beams carrying interference fringe distribution. The parallel light beam first passes through the polarizer 2, so that the polarization direction of the interference fringe light field 1 is 45° to the vertical direction, ensuring that the light intensity of the p-polarization component and the s-polarization component are equal, and then vertically incident on...

Embodiment 2

[0033] Embodiment 2 of the present invention is a method for enhancing the sensitivity of the interferometric phase shift of an asymmetric spatial heterodyne interferometer by using Moiré fringes.

[0034] like Figure 4 As shown, the interference fringe light field 1 output by the asymmetric spatial heterodyne interferometer is produced by the green line of oxygen atoms with a wavelength of 557.7nm. The period is 200μm, such as Figure 5 As shown, according to the formula It can be obtained that the divergence angle of the interference fringe light field is about 1.4mrad, which is similar to a beam of parallel light beams carrying interference fringe distribution. Since the light source is natural light, has no polarization characteristics, and the coherence length is very short, interference between the two sets of interference fringes formed on the detector is impossible, so there is no need to add a polarizer in the optical path. This parallel light beam is vertically i...

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Abstract

The invention discloses a method for enhancing the sensitivity of interference phase shift based on Moiré fringes, which includes: the interference fringe light field formed by a spatial modulation interferometer passes through a polarizer and then enters an ordinary beam splitting prism, wherein the reflected light passes through a first plane reflector After reflection, it returns along the original optical path, and after passing through the ordinary beam splitter again, it passes through the polarization beam splitter and enters the array detector to form a set of interference fringe distribution; the transmitted light is reflected twice and then enters the polarization beam splitter. When it is incident on the array detector, another set of interference fringe distribution with opposite fringe orientation is formed. Adjust the third plane reflector so that there is an angle between the two groups of interference fringes on the array detector to form Moiré fringes. When the interference fringes are phase shifted, the moiré fringes will be shifted obviously. The moiré fringe-based interference phase shift sensitivity enhancement method of the invention has universality and can effectively improve the measurement sensitivity of a space modulation interference instrument.

Description

technical field [0001] The invention belongs to the field of interference instrument design, in particular to a method for enhancing the sensitivity of interference phase shift based on Moiré fringes. Background technique [0002] Interferometry technology is an important branch in the field of optical technology. It is a measurement technology based on light wave interference. It records the information of the target to be measured in the form of interference fringes. By analyzing and processing the phase of the interference fringes, the obtained The physical quantity to be measured is widely used in the field of optical detection. [0003] In the application field of Doppler velocimetry using interferometry technology, it is often necessary to accurately measure the phase shift of interference fringes. At present, the interferometers used to measure Doppler velocity mainly include Fabry-Perot interferometer, Michelson interferometer, fixed delay interferometer and asymmet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/0201
Inventor 方亮况银丽程欣彭翔张辉刘恩海
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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