Three-dimensional MEMS oceanic turbulence sensor

A sensor and marine technology, applied in the field of sensors, can solve the problems of decreased sensitivity, decreased hotline response speed, decreased resolution, etc., and achieves good results and accurate vector test results.

Active Publication Date: 2020-04-14
OCEAN UNIV OF CHINA
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Problems solved by technology

And because the amplitude of wall turbulence pulsation signal is small and the range of pulsation frequency is wide, the spatial resolution of existing ocean turbulence sensors is on the order of millimeters to centimeters, and they are all single-point sensing methods. They lack vector detection capabilities and

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  • Three-dimensional MEMS oceanic turbulence sensor
  • Three-dimensional MEMS oceanic turbulence sensor
  • Three-dimensional MEMS oceanic turbulence sensor

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Embodiment Construction

[0031] combine figure 1 with figure 2 , a three-dimensional MEMS ocean turbulence sensor, the final structure of the sensor is a cuboid shape with a length and width of 1mm and a thickness of about 0.4mm, including a sensing unit, which includes a base structure 1, the base structure 1 is a thin silicon-based material with a thickness of 0.2mm, the length and width are 1mm; the base structure 1 is provided with four micro-cantilever beams 2 arranged in a cross shape, and the lower end surface of the micro-cantilever beams 2 passes through the connecting layer 4 (such as SiO 2 Layer) connected to the base structure, each micro-cantilever beam is curled toward one end of the cross-shaped center, and the base structure 1 and the micro-cantilever beam 2 are covered with an elastic coating body 3; each micro-cantilever beam 1 includes a bottom-up Si thin film layer 5, SiN thin film layer 6 and Cr thin film layer 7 are arranged on it, and piezoresistors are arranged on the microca...

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Abstract

The invention relating to the field of sensors discloses a three-dimensional MEMS oceanic turbulence sensor comprising a sensing unit including a substrate structure. Four micro-cantilever beams arranged in a cross shape are arranged on the substrate structure; the end, facing the center of the cross shape, of each micro-cantilever beam is in a curled shape; and the substrate structure and the micro-cantilever beams are coated with elastic coating bodies. Each micro-cantilever beam comprises a Si film layer, a SiN film layer and a Cr film layer which are arranged from bottom to top; a piezoresistor is arranged on the micro-cantilever beam; and each piezoresistor and three constant resistors form a Wheatstone bridge. The lower end faces of the micro-cantilever beams are connected to the substrate structure through SiO2 layers, the substrate structure is in a cuboid shape, one end of each micro-cantilever beam is arranged on one outer side edge of the substrate structure, and the other end of each micro-cantilever beam extends to the center of the substrate structure and curls upwards.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a three-dimensional MEMS ocean turbulence sensor. Background technique [0002] In the field of marine detection, there are mostly one-dimensional pressure sensors and two-dimensional scissor stress sensors on the market. [0003] Ocean turbulence is a highly complex three-dimensional unsteady, irregular flow with rotation, and the magnitude and direction of the velocity of motion at any point in the water body are chaotic. Most of the existing sensors use single-point sensing, based on the assumption of "uniform and isotropic" to realize the observation of turbulent flow, but the resolution of the test is low, and it lacks the ability of three-dimensional vector test. Therefore, only by obtaining distributed, three-dimensional vector high-resolution turbulence evolution data can the ability to observe ocean turbulent mixing be improved. [0004] In recent years, with the development of ...

Claims

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Application Information

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IPC IPC(8): G01L9/06G01L19/00B81B7/02B81B3/00
CPCB81B3/0021B81B7/02B81B2201/0264G01L9/06G01L19/00
Inventor 杨华孙斐王晓波宋大雷王向东
Owner OCEAN UNIV OF CHINA
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