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Liquid gas circulation system

A liquid gas and circulating system technology, applied in pipeline systems, liquid degassing, auxiliary material liquid degassing, etc., can solve the problems of unstable liquid gas transmission, easy gasification of liquid gas, and difficult control of liquid level, etc. The effect of stable liquid level, reducing liquid level fluctuation and reducing discharge resistance

Inactive Publication Date: 2020-04-21
SUZHOU KUNYUAN OPTOELECTRONICS CO LTD
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Problems solved by technology

[0010] The purpose of the present invention is to solve the problem of violent boiling of the liquid surface when the reflux liquid of the liquid return pipe enters the separator when the liquid gas circulation system of the prior art is used to circulate the liquid gas, which makes the liquid surface difficult to control deficiencies, providing a liquid gas circulation system
[0011] The further object of the present invention is to solve the problems in the prior art that the liquid gas is easily vaporized during the transportation process, and the liquid gas transmission is unstable during the transmission process, and provides a liquid gas circulation system

Method used

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Embodiment Construction

[0035] The system of the present invention will be further described below in conjunction with the accompanying drawings and examples.

[0036] like Figure 1-4 As shown, the liquid gas circulation system of the present invention will be described in detail below by taking the supply of liquid nitrogen for the MBE system as an example.

[0037] The liquid gas circulation system of the embodiment structure of the present invention includes a liquid nitrogen separator 4 , a vacuum infusion pipeline 2 , a liquid return pipe 3 , and an exhaust pipe 8 . The vacuum infusion pipeline includes a liquid inlet pipe 201 and a liquid outlet pipe 202 . The liquid nitrogen separator is provided with a liquid nitrogen inlet port 407 , a liquid nitrogen return port 303 , a nitrogen exhaust port 406 , a liquid outlet port 410 , a pressure gauge port 405 and a pressure protection port 404 . The vacuum stainless steel liquid inlet pipe 201 is connected to the liquid inlet 407 of the liquid nitr...

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Abstract

When a liquid gas circulation system in the prior art is adopted to circulate a liquid gas, a reflux liquid of a liquid return pipe enters a separator to cause violent boiling of the liquid level, sothat the liquid level fluctuates greatly and the liquid level is not easy to control. In allusion to the above deficiency, the invention provides a liquid gas circulation system, which comprises a liquid conveying pipeline, a liquid return pipe, a separator and an exhaust pipe. The liquid conveying pipeline comprises a liquid inlet pipe and a liquid outlet pipe; the liquid inlet pipe is communicated with the inner cavity of the separator through the liquid inlet; the liquid return pipe is communicated with the inner cavity of the separator through a liquid return port; the exhaust pipe is communicated with the inner cavity of the separator through an exhaust port. By adopting the liquid gas circulation system, the fluctuation of the liquid level is small, the height of the liquid level iseasy to control and detect, liquid nitrogen and a mixed medium are restrained to move in a vacuum pipeline, heat can be effectively isolated, the amount of naturally evaporated liquid nitrogen is small, and the utilization rate is increased.

Description

technical field [0001] The invention relates to the technical field of liquid gas separation, in particular to a liquid gas circulation system for realizing liquid gas gas-liquid separation. Background technique [0002] As the world's largest selling inorganic substance, liquid nitrogen plays an important role in our daily life and industrial production process. Due to the low temperature and inert properties of liquid nitrogen, it has been widely used in food freezing, biomedicine, electronics industry, superconducting research and aerospace fields. In particular, mass production in the electronics industry requires a large amount of liquid nitrogen to support, of which MBE equipment is one of them. Since the MBE equipment requires the equipment to maintain an extremely low temperature during the atomic layer growth process, the equipment needs to be cooled all the time. As a cheap low-temperature medium, liquid nitrogen naturally becomes the best cooling material. There...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D19/00F17D1/08
CPCB01D19/0005F17D1/08
Inventor 马栋梁陈意桥
Owner SUZHOU KUNYUAN OPTOELECTRONICS CO LTD
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