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A kind of acceleration sensor based on thermopile

A technology of acceleration sensor and thermopile, which is applied in the field of sensors, can solve the problems of long R&D cycle, the acceleration sensor is susceptible to interference, complex structure, etc., and achieves the effect of low cost, simple structure and small volume

Active Publication Date: 2022-02-08
AVIC BEIJING CHANGCHENG AVIATION MEASUREMENT & CONTROL TECH INST +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention: simplify the structure, reduce the cost, and be easy to process, which is used to solve the problems that the existing acceleration sensor is susceptible to interference, complex structure, and long research and development cycle.

Method used

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  • A kind of acceleration sensor based on thermopile
  • A kind of acceleration sensor based on thermopile
  • A kind of acceleration sensor based on thermopile

Examples

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Embodiment 1

[0025] Example 1, see Figure 1-3b , providing a thermopile-based acceleration sensor, the acceleration sensor includes a package body, a bonding layer, a substrate, a left thermopile, a right thermopile, and a heating unit;

[0026] The package body is divided into package left support, package right support, left suspension beam, right suspension beam and mass block, the left suspension beam and right suspension beam are respectively located on the left and right sides of the mass block, and the mass block passes through the left suspension beam and the right suspension beam. The beam is suspended between the left support of the package and the right support of the package, and the left support of the package and the right support of the package are both cured and packaged on the upper end surface of the substrate through the bonding layer; the left suspension beam and the right suspension beam form an elastic support for the mass block, The movement of the package body will...

Embodiment 2

[0035] Example 2, see Figure 1-2b , 4a and 4b, providing a thermopile-based acceleration sensor, the acceleration sensor includes a package body, a bonding layer, a substrate, a left thermopile, a right thermopile and a heating unit;

[0036] The package body is divided into package left support, package right support, left suspension beam, right suspension beam and mass block, the left suspension beam and right suspension beam are respectively located on the left and right sides of the mass block, and the mass block passes through the left suspension beam and the right suspension beam. The beam is suspended between the left support of the package and the right support of the package, and the left support of the package and the right support of the package are both cured and packaged on the upper end surface of the substrate through the bonding layer; the left suspension beam and the right suspension beam form an elastic support for the mass block, The movement of the package...

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Abstract

The invention relates to an acceleration sensor based on a thermopile, the acceleration sensor includes a package body, a bonding layer, a substrate, a left thermopile, a right thermopile and a heating unit; the heating unit generates heat, and the heat will pass through the mass block and The air between the heating units is passed to the left and right thermopiles. When there is acceleration, the heat felt by the two thermopiles is in a steady state. When there is acceleration, the movement of the mass will cause the gap between the mass and the heating unit to occur. Changes or changes in the gap between the mass block and the left and right thermopiles, thereby affecting the amount of air in the gap space, which in turn leads to changes in heat transfer, resulting in changes in the thermal results of the left and right thermopiles, and the acceleration is obtained through calculation, calculation or mapping of the changes . The invention has the advantages of simple structure, low cost, easy processing, simple principle, small volume, good integration, high sensitivity, and is not easily disturbed by the electromagnetic environment, and can be mass-produced by micro-processing technology.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a thermopile-based acceleration sensor. Background technique [0002] The accelerometer is the key component used to measure the acceleration in the inertial system. The micro-acceleration sensor manufactured based on the micro-electro-mechanical system (MEMS, Micro-Electro-Mechanical-System) is small in size, low in cost, good in integration and excellent in performance. And many other advantages have been used more and more in a very wide range of fields such as industry, medical treatment, civilian use, and military affairs. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. In the development process, capacitive, piezoresistive, and piezoelectric as the way to detect acceleration are the main mechanisms used. However, although the capacitive accele...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/03
CPCG01P15/03
Inventor 梁晓波高云端刘冠华黄漫国李欣
Owner AVIC BEIJING CHANGCHENG AVIATION MEASUREMENT & CONTROL TECH INST