A kind of acceleration sensor based on thermopile
A technology of acceleration sensor and thermopile, which is applied in the field of sensors, can solve the problems of long R&D cycle, the acceleration sensor is susceptible to interference, complex structure, etc., and achieves the effect of low cost, simple structure and small volume
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Embodiment 1
[0025] Example 1, see Figure 1-3b , providing a thermopile-based acceleration sensor, the acceleration sensor includes a package body, a bonding layer, a substrate, a left thermopile, a right thermopile, and a heating unit;
[0026] The package body is divided into package left support, package right support, left suspension beam, right suspension beam and mass block, the left suspension beam and right suspension beam are respectively located on the left and right sides of the mass block, and the mass block passes through the left suspension beam and the right suspension beam. The beam is suspended between the left support of the package and the right support of the package, and the left support of the package and the right support of the package are both cured and packaged on the upper end surface of the substrate through the bonding layer; the left suspension beam and the right suspension beam form an elastic support for the mass block, The movement of the package body will...
Embodiment 2
[0035] Example 2, see Figure 1-2b , 4a and 4b, providing a thermopile-based acceleration sensor, the acceleration sensor includes a package body, a bonding layer, a substrate, a left thermopile, a right thermopile and a heating unit;
[0036] The package body is divided into package left support, package right support, left suspension beam, right suspension beam and mass block, the left suspension beam and right suspension beam are respectively located on the left and right sides of the mass block, and the mass block passes through the left suspension beam and the right suspension beam. The beam is suspended between the left support of the package and the right support of the package, and the left support of the package and the right support of the package are both cured and packaged on the upper end surface of the substrate through the bonding layer; the left suspension beam and the right suspension beam form an elastic support for the mass block, The movement of the package...
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