Microfluidic actuator

Abstract

A microfluidic actuator comprises a substrate, a cavity layer, a vibration layer, a lower electrode layer, a piezoelectric actuation layer, an upper electrode layer, a pore plate layer and a flow channel layer. The substrate forms an outflow hole, a first inflow hole and a second inflow hole through an etching process. The cavity layer is formed on the substrate, and a flow storage chamber is formed through an etching process. The vibration layer is formed on the cavity layer. The lower electrode layer is formed on the vibration layer. The piezoelectric actuation layer is formed on the lower electrode layer. The upper electrode layer is formed on the piezoelectric actuation layer. The pore plate layer forms a flow outlet and a flow inlet through an etching process. The flow channel layer is formed on the pore plate layer, forms a flow outlet channel and a flow inlet channel through a photoetching process, and is jointed with the substrate. The microfluidic actuator provides a driving power supply to the upper electrode layer and the lower electrode layer to drive and control the vibration layer to move up and down so as to complete fluid transmission.

Description

【Technical field】 [0001] This case relates to an actuator, especially a microfluidic actuator made of a microelectromechanical semiconductor thin film. 【Background technique】 [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, the fluid actuation contained in products such as micropumps, sprayers, inkjet heads, and industrial printing devices device as its key technology. [0003] With the rapid development of science and technology, the application of fluid conveying structure is becoming more and more diversified, such as industrial application, biomedical application, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that Traditional fluid actuators are gradually trending towards miniaturization of devices and maximization of flow rate. [00...

AI Technical Summary

Problems solved by technology

[0004] In the prior art, although there are microfluidic actuators manufactured by micro-electromechanical processes, when the known microfluidic actuators are actuated, the displacement of the piezoelectric layer is too small, resulting in the transmitted flow rate Insufficient, therefore, how to use the innovative structure to break through its technical bottleneck is an important content of development

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