Source bottle controller monitoring system
A technology for monitoring systems and controllers, applied in general control systems, control/regulation systems, test/monitoring control systems, etc., can solve problems such as low reliability, failure to issue any alarms, high or low temperature of the source bottle controller, etc. problem, to achieve the effect of improving reliability
Pending Publication Date: 2020-06-19
ADVANCED SEMICON MFG CO LTD
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Problems solved by technology
[0003] The technical problem to be solved by the present invention is to overcome the problem that the source bottle controller in the prior art cannot send any alarm when some failures or power failures occur, and the problem that the temperature of the source bottle controller is too high or too low also depends on manual inspection can only be discovered, thus leading to the defect of low reliability, a source bottle controller monitoring system is proposed
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[0018] The preferred embodiments of the present invention are given below in conjunction with the accompanying drawings to describe the technical solution of the present invention in detail, but the present invention is not limited to the scope of the embodiments.
[0019] refer to figure 1 As shown, a kind of source bottle controller monitoring system of a preferred embodiment of the present invention comprises a plurality of source bottle controllers 1 ( figure 1 Only schematically draw one) and a diffusion furnace 2, each source bottle controller 1 has a temperature output port 11 (used as temperature analog output), each diffusion furnace 2 includes a gas interface board 21, the gas interface Plate 21 includes a plurality of flow meter output ports (specific ports not shown in the figure). The temperature analog output port 11 of each source bottle controller 1 is connected to different flowmeter output ports in the gas interface board 21 via the electrical connection lin...
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The invention discloses a source bottle controller monitoring system. The source bottle controller monitoring system comprises a source bottle controller, a diffusion furnace and an electric connecting wire, the source bottle controller comprises a temperature analog quantity output port, the diffusion furnace comprises a gas interface board, the gas interface board is provided with a flow meter output port, and the two ends of the electric connecting wire are connected into the temperature analog quantity output port and the flow meter output port respectively; the diffusion furnace further comprises a controller and a displayer, the controller is connected to the output port of the flow meter, the controller is configured to receive voltage signals output from the temperature analog quantity output port and transmitted through the output port of the flow meter, the voltage signals are converted into temperature readings, and the temperature readings are displayed by the displayer. According to the source bottle controller monitoring system, the monitoring temperature of the source bottle controller can be directly monitored by utilizing the display of the diffusion furnace equipment, and faults and power failure can be found in time, so that throwing caused by abnormity of the source bottle controller is reduced, and the reliability of the equipment is improved.
Description
technical field [0001] The invention relates to the fields of diffusion furnaces and source bottle controllers, in particular to a source bottle controller monitoring system. Background technique [0002] The source bottle controller cannot send out any alarms in the event of some faults or power outages, and can only be detected by manual inspection, and whether the temperature of the source bottle controller exceeds the appropriate range and is too high or too low also depends on manual inspection to find out. Cannot be displayed directly on the device. This is very unreliable for production. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the problem that the source bottle controller in the prior art cannot send any alarm when some failures or power failures occur, and the problem that the temperature of the source bottle controller is too high or too low also depends on manual inspection It can only be dis...
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IPC IPC(8): G05B23/02
CPCG05B23/0213
Inventor 晁磊陈崇山沈震
Owner ADVANCED SEMICON MFG CO LTD