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Detection of contaminations on sensing surface of thermal sensor

A heat sensor, heat flow sensor technology, applied in the field of computer program products, pollution on the surface, heat flow sensor, can solve problems such as the detection of pollution without mentioning

Pending Publication Date: 2020-06-30
SENSIRION AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The literature does not mention detection of contamination

Method used

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  • Detection of contaminations on sensing surface of thermal sensor
  • Detection of contaminations on sensing surface of thermal sensor
  • Detection of contaminations on sensing surface of thermal sensor

Examples

Experimental program
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Embodiment Construction

[0095] Flow Sensor Setup and Operation

[0096] figure 1 A thermal flow sensor 1 according to a first embodiment is shown. The details of the flow sensor are in figure 2 shown in . The arrangement and operation of such a flow sensor is disclosed in WO 01 / 98736 A1. As described in this document, the sensor may be operated to determine the mass flow rate of a fluid (ie, gas or liquid) flowing through the conduit 10 along the flow direction F.

[0097] From figure 2 It can be seen that the flow sensor 1 is integrated on a silicon substrate 20 in which an opening or recess 21 has been formed by etching. The membrane 22 spans the opening or recess 21 . On the membrane 22, a resistance heater 41, a first (upstream) temperature sensor 31 and a second (downstream) temperature sensor 32 are arranged. The first temperature sensor 31 is arranged upstream of the heater 41 with respect to the flow direction F, and the second temperature sensor 32 is arranged downstream of the h...

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PUM

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Abstract

A thermal sensor comprises an active element (41), e.g., a heater or cooler, at least one temperature sensor (31), and processing circuitry (50). The processing circuitry causes a change of power supplied to the active element (41). It then determines, at a plurality of times, a thermal parameter based on an output signal of the temperature sensors and analyzes the transient behavior of the thermal parameter. Based on this analysis, the processing circuitry determines a contamination signal that is indicative of a contamination on a sensing surface of the thermal sensor. If the thermal sensorcomprises a plurality of temperature sensors arranged in different sectors of the sensing surface, a multi-sector thermal signal can be derived from the outputs of the sensors, and determination of the contamination signal can be based on the multi-sector thermal signal.

Description

technical field [0001] The present invention relates to a thermal sensor, in particular to a thermal flow sensor configured to detect the presence of contamination on a sensing surface of the thermal sensor. The invention also relates to a method for detecting contamination on a surface of a thermal sensor and also to a corresponding computer program product. Background technique [0002] A commonly used microthermal flow sensor includes a heater and two spatially separated temperature sensors. Temperature sensors are usually located symmetrically upstream and downstream of the heater to measure the amount of heat that has been carried away by the flow medium. The heater and temperature sensor may be embedded in or arranged on the thin film across the recess or opening in the bulk semiconductor material. Thermopiles can be used as temperature sensors. An example of a microthermal flow sensor of this type is disclosed in WO 01 / 98736 A1. [0003] As a measure for mass flow...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01F1/692G01N25/72
CPCG01F1/692G01N25/72G01F1/7084G01F1/6845G01F1/6888G01F1/6965G01F1/699G01F25/10G01N17/008G01F1/698G01K13/02
Inventor 马克·霍尔农安德里亚斯·鲁格哈里·菲吉卢卡斯·胡伯
Owner SENSIRION AG
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