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Capacitive micromachined ultrasonic transducer

A technology of ultrasonic transducers and electrostatic capacitors, which is applied in the direction of instruments, circuits, and material analysis using sound waves/ultrasonic waves/infrasonic waves, etc., can solve problems such as difficulties, and achieve the effect of improving the sensitivity of sending and receiving

Active Publication Date: 2020-08-18
KOREA INST OF SCI & TECH +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

When the gap is increased in order to increase this average displacement, higher voltages need to be supplied, but this also presents difficulties

Method used

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  • Capacitive micromachined ultrasonic transducer
  • Capacitive micromachined ultrasonic transducer
  • Capacitive micromachined ultrasonic transducer

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Embodiment Construction

[0053] Hereinafter, several preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0054] Multiple embodiments of the present invention are provided in order to more completely describe the present invention to those skilled in the art. The following embodiments can be modified into other various forms, and the scope of the present invention is not limited to the following embodiments. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In addition, for convenience and clarity of illustration, the thickness and size of each layer in the drawings are exaggerated.

[0055] figure 1 It is a schematic cross-sectional view showing a capacitive micromachined ultrasonic transducer (CMUT) 100 according to an embodiment of the present invention. figure 2 yes figure 1 A schematic top view of the c...

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Abstract

Provided is a capacitive micromachined ultrasonic transducer (CMUT) including a substrate, a top electrode provided on the substrate to be spaced apart from the substrate, a supporter made of an insulating material and coupled between the substrate and an edge of the top electrode to support and fix the edge of the top electrode and to define a gap between the substrate and the edge of the top electrode, and a plurality of nanoposts having both ends coupled and fixed to the substrate and the top electrode in the gap, and being compressible and stretchable in a longitudinal direction to at least vertically move the top electrode when power is applied to the top electrode.

Description

technical field [0001] The present invention relates to an ultrasonic device, in particular to an electrostatic capacitive micromachined ultrasonic transducer (Capacitive Micromachined Ultrasonic Transducer, CMUT). Background technique [0002] An ultrasonic transducer (or ultrasonic transducer) is a device that converts electrical signals into ultrasonic signals or vice versa. In the past, piezoelectric micromachined ultrasonic transducers (Piezoelectric Micromachined Ultrasonic Transducer, PMUT), which use piezoelectric materials to process ultrasonic signals, have been widely used, but recently, they are expanding the operating frequency range and the bandwidth of transducers and can pass through semiconductors. Process-integrated capacitive micromachined ultrasonic transducer (CMUT) is studied. [0003] However, in capacitive micromachined ultrasonic transducers (CMUTs), it is difficult to have high transceiving sensitivity due to the limited gap height and limited volt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06
CPCB06B1/06B06B1/0292G01N29/2406G01N29/245H01L21/7685B06B2201/51
Inventor 李炳喆崔里诺李活
Owner KOREA INST OF SCI & TECH
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