Microactuator, head suspension assembly and disk device

Abstract

Embodiments of the invention provide a microactuator, a head suspension assembly and a disk device. According to one embodiment, a microactuator includes a wiring substrate (40), and a piezoelectric element (50) connected to first and second connecting pads (70a, 70b) of the wiring substrate. The piezoelectric element includes a piezoelectric substrate (51), and a first electrode and a second electrode (56) provided on surfaces of the piezoelectric substrate. The piezoelectric substrate is provided with a first main surface (S1), a second main surface (S2) opposite to the first main surface and first and second side surfaces (SS2) opposite to each other. The first electrode includes a first electrode portion, a second electrode portion and a third electrode portion. The second electrode includes a fifth electrode portion (56a) and a sixth electrode portion (56b). The fifth electrode portion has an electrode end opposite to the first electrode portion, is provided on the first main surface, and faces the third electrode portion across the piezoelectric substrate. The piezoelectric element includes a protective insulating layer (60) covering at lease an end portion of the fifth electrode portion including the electrode end.

Description

[0001] This application enjoys the priority of the basic application based on Japanese Patent Application No. 2019-38826 (filing date: March 4, 2019). This application incorporates the entire content of the basic application by referring to the basic application. technical field [0002] Embodiments of the present invention relate to a microactuator having a piezoelectric element, a head suspension unit including the microactuator, and a disk device. Background technique [0003] As a disk device, for example, a hard disk drive (HDD) is equipped with: a plurality of magnetic disks rotatably arranged in a casing; a plurality of magnetic heads for reading and writing information on the magnetic disks; Moving head drive. [0004] The head drive has a plurality of head suspension assemblies that support the magnetic head at the front end. The head suspension assembly has a base plate with one end fixed to the arm, a load beam extending from the base plate, and a flexible membe...

AI Technical Summary

Problems solved by technology

However, in this case, since the electrodes are close to each other, there is a possibility that the two electrodes may be short-circuited by the conductive adhesive material when bonding to the conductive pad.

In order to prevent this, it is necessary to increase the gap between the electrodes, which will hinder the increase in the displacement of the piezoelectric element.

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