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Cover plate and piezoelectric device

A technology of piezoelectric sheet and flat plate, applied in the field of piezoelectric devices

Inactive Publication Date: 2020-09-15
NIHON DEMPA KOGYO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When using a cover made of metal as the cover, the shape increases due to the need for a flange for connecting the cover to the base, but in the case of a ceramic cover, no flange is required , so it is easy to miniaturize

Method used

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  • Cover plate and piezoelectric device
  • Cover plate and piezoelectric device
  • Cover plate and piezoelectric device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0061]

[0062] First, the package of the first embodiment will be described. figure 1 It is a drawing divided into layers for understanding the package 80 . Furthermore, figure 1 In , piezoelectric elements such as piezoelectric filters such as crystals, piezoelectric vibrators, and piezoelectric oscillators are not shown. The package 80 of the first embodiment is used as a package of a piezoelectric element, and will be described as a representative package of a piezoelectric vibrator.

[0063] Such as figure 1 As shown, the package body 80 is formed by stacking a base plate 30 made of ceramics and a cover plate 10 made of ceramics. The base plate 30 made of ceramics constitutes the bottom of the package body 80 and is rectangular in plan view. The board 10 is rectangular in plan view. The ceramic cover plate 10 serving as the first cover plate includes a flat top plate 11 and a frame-shaped frame plate 12 , and forms a cavity for accommodating a piezoelectric vibratin...

no. 2 approach

[0088]

[0089] FIG. 5( a ) is a diagram showing a cover plate 10A as a second cover plate. Fig. 5(a) is a plan view of the cover plate 10A seen from below (-Z axis direction). In addition, in FIG. 5(a), the same symbols as those in FIG. 3(a) represent the same functions and structures, so the second cover plate 10A of the second embodiment and the first cover plate 10A shown in FIG. 3(a) will be particularly described. The different points of the cover plate 10.

[0090] As shown in FIG. 5( a ), recessed portions 19B are formed at the four inner corners. The depressed portion 19B is an elongated arc-shaped depression formed by a part of an elongated ellipse. In addition, the metal film 16 is formed in the two depressed portions 19B on the −Y axis side. As described above, the depressed portion may not be a part of a polygon, but may be a part of a circle or an ellipse.

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PUM

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Abstract

The invention provides a ceramic cover plate and a piezoelectric device, wherein the curvature R of an inner side corner part is eliminated. A ceramic cover plate according to an embodiment includes aflat plate (11) and a frame (12). The flat plate (11) has a rectangular shape, includes a first flat surface (11U) and a second flat surface (11B) opposite to the first flat surface, and is formed ofa ceramic. Furthermore, the housing (12) includes a third plane (12U) overlapping with the second plane and a fourth plane (12B) opposite to the third plane, has the same outer periphery as the flatplate, includes a rectangular space, which can include a piezoelectric sheet, and includes a first side and a second side in plan view, and is formed of a ceramic. In the frame body, a corner part where the first side and the second side intersect includes a recessed part (19A) which, in plan view, is recessed further toward the outer peripheral side than a virtual intersection point where the first side and the second side intersect each other in a straight line.

Description

technical field [0001] The present invention relates to a piezoelectric device and a cap for the piezoelectric device. Background technique [0002] Piezoelectric devices such as piezoelectric filters using piezoelectric materials such as crystals, piezoelectric vibrators, and piezoelectric oscillators are used in an extremely wide range of fields. [0003] As one of the above-mentioned piezoelectric devices, there is, for example, the piezoelectric device disclosed in Patent Document 1, which includes a flat base, a piezoelectric element packaged in the base, and ceramics covering the piezoelectric element. cover plate. When using a cover made of metal as the cover, the shape increases due to the need for a flange for connecting the cover to the base, but in the case of a ceramic cover, no flange is required , so it is easy to miniaturize. In addition, in the ceramic cover plate of Patent Document 1, a metal film is formed on substantially the entire inner peripheral sur...

Claims

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Application Information

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IPC IPC(8): H03H9/02H03H9/19
CPCH03H9/02H03H9/19
Inventor 大久保宏美
Owner NIHON DEMPA KOGYO CO LTD