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Transient measurement device and detection method for laser-induced damage characteristics of optical components

A technology for optical components and measuring devices, which is applied to measuring devices, using optical devices, and optical instrument testing, etc., can solve the problems of complex test optical path structure and easy to be affected by the environment, achieves a large longitudinal measurement range, improves damage characteristics, and laterally high spatial resolution

Active Publication Date: 2022-01-28
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

Among them, the polarization shadow microscopic imaging technology is used to study the damage transient characteristics of fused silica optical materials under the action of nanosecond and picosecond pulsed lasers. Four detection optical paths are used to obtain the lateral direction of the damage area on the surface of fused silica at different times after the pulsed laser is applied. Growth and material splatter images (see prior art 1, S.G.Demos, R.N.Raman, R.A.Negres, et al, Time-resolved imaging of processes associated with exit-surface damage growth in fused silica following exposure to nanosecond laserpulses, Optics Express, 21(4), 4875-4888, 2013), the structure of the test light path is complex, and only the lateral size information of the damaged area can be obtained; the time-resolved digital holography technology uses the ideal beam as a reference, and the test beam passes through the damaged area to obtain the laser irradiation area of ​​the optical element The transient variation of the optical field intensity and phase information (see prior art 2, A.Melninkitis, N.Siaulys, B.Momgaudis, et al, What time-resolved measurements tell us about femtosecond laser damage, Proc.SPIE, 9632 , 96320O / 1-96320O / 11, 2015), susceptible to environmental influences

Method used

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  • Transient measurement device and detection method for laser-induced damage characteristics of optical components
  • Transient measurement device and detection method for laser-induced damage characteristics of optical components
  • Transient measurement device and detection method for laser-induced damage characteristics of optical components

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Embodiment

[0059] The optical element coated with an anti-reflection film is used as the optical element to be tested, and the light source 1 outputs laser pulses with a wavelength of 1064nm; the energy control system 3 is used to control and adjust the energy of the test light, and the adjustment range is 1% to 99% of the output laser energy The sample stage 7 is used to clamp the optical element to be tested, and adjust the position and angle of the optical element to be tested in the XYZ direction; the beam quality diagnostic system 8 is used to measure the laser beam spot size, pulse width, and monitoring energy, wherein the beam diameter is 2mm, the pulse width is 7.21ns; the beam shaping filter system 10 is used for shaping, filtering, and beam expansion of the probe light; the polarization delay control system 11 includes a third beam splitter 1101, a half-wave plate 1102, a third mirror 1103, a fourth Reflector 1104, first polarization beam splitter 1105, adjusting the position of...

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Abstract

A transient measurement device and measurement method for laser-induced damage characteristics of an optical element. The device includes a light source, a first beam splitter, a second beam splitter, a first reflector, a second reflector, a beam shaping filter system, a polarization delay control system, a sample stage, an online damage characteristic measurement system, an energy control system, and a focusing system , beam quality diagnosis system, optical gate, optical trap, computer; the present invention divides the strong laser beam into beams, one part is used as the damage test beam, and the other part is used as the detection beam, and the polarization delay control system is adopted to adjust the interval time between the detection beam and the damage test beam , combined with the damage feature online measurement system, detects the phase information and light intensity information of the irradiated area of ​​the optical element at different times after the pulse laser is applied, and obtains the three-dimensional shape of the damaged area and the relative change of the transmittance distribution.

Description

technical field [0001] The invention relates to the transient measurement of laser-induced damage characteristics of optical components, in particular to a transient measurement device and detection method of laser-induced damage characteristics of optical components. Background technique [0002] Under high-flux pulsed laser irradiation, optical components are prone to damage, which affects their optical, mechanical, thermal and other properties. Under the action of subsequent pulsed lasers, even small initial damage points may grow rapidly and form larger-sized damage. Points or damaged areas will affect the performance and life of optical components, reduce the output energy of the laser system and the quality of the laser beam, and may endanger the operation safety of the entire high-power laser device. [0003] In view of the short interaction time between pulsed laser and optical materials, researchers have proposed a variety of time-resolved damage transient measureme...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02G01B11/24G01N21/59
CPCG01M11/025G01M11/0271G01M11/0207G01B11/2441G01N21/59
Inventor 李杰巴荣声周信达郑垠波丁磊陈宁徐宏磊
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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