Transient measurement device and detection method for laser-induced damage characteristics of optical components
A technology for optical components and measuring devices, which is applied to measuring devices, using optical devices, and optical instrument testing, etc., can solve the problems of complex test optical path structure and easy to be affected by the environment, achieves a large longitudinal measurement range, improves damage characteristics, and laterally high spatial resolution
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[0059] The optical element coated with an anti-reflection film is used as the optical element to be tested, and the light source 1 outputs laser pulses with a wavelength of 1064nm; the energy control system 3 is used to control and adjust the energy of the test light, and the adjustment range is 1% to 99% of the output laser energy The sample stage 7 is used to clamp the optical element to be tested, and adjust the position and angle of the optical element to be tested in the XYZ direction; the beam quality diagnostic system 8 is used to measure the laser beam spot size, pulse width, and monitoring energy, wherein the beam diameter is 2mm, the pulse width is 7.21ns; the beam shaping filter system 10 is used for shaping, filtering, and beam expansion of the probe light; the polarization delay control system 11 includes a third beam splitter 1101, a half-wave plate 1102, a third mirror 1103, a fourth Reflector 1104, first polarization beam splitter 1105, adjusting the position of...
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