A method and system for detecting subsurface defects of an optical element

Abstract

The invention relates to a detection method and a detection system for sub-surface defects of optical components. The detection method comprises the following steps: an optical fiber coupler is used for shunting an input broadband light source; one path of low-coherence light is input into a reference arm and is reflected by a zero-optical-path reference surface to form reference light; the other path of low-coherence light is input into a sample arm and is subjected to optical path delaying treatment; signal light is obtained by an optical fiber probe array; the signal light and the reference light are coupled by an optical fiber to be subjected to coherent superposition to form spectral information; and two-dimensional or three-dimensional spectral information in a detected area can be obtained by movement of a sample or the optical fiber probe array to reconstruct high-resolution images. The detection system comprises the broadband light source, the optical fiber coupler, the reference arm, the sample arm and a detection arm, wherein the sample arm comprises an optical path delaying unit and the optical fiber probe array which are connected with each other. Compared with the prior art, the detection method and the detection system can be used for quickly displaying defect structure information of a multi-space area with high resolution; novel approaches are provided for the sub-surface defects of the optical components.

Description

technical field [0001] The invention relates to optical path delay technology, photon nano jet technology, optical coherence tomography technology and subsurface defect detection technology of optical elements, in particular to a fast and high-resolution detection method and detection system for subsurface defects of optical elements. Background technique [0002] With the continuous development of high-energy, high-power laser systems and high-resolution, high-contrast spatial optical imaging systems, the manufacture of optical components is developing towards ultra-precision and ultra-smooth processing. The surface roughness of optical components should also eliminate or reduce subsurface defects of optical components. [0003] At present, the methods for detecting subsurface damage of optical components are mainly divided into destructive testing and nondestructive testing. Commonly used destructive testing techniques include cross-sectional microscopy, angle polishing, ...

AI Technical Summary

Problems solved by technology

These detection methods have the advantages of not damaging the optical components and increasing the processing cost, but they often have the disadvantages of low spatial resolution and slow detection speed.

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