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Output feedback control method and device of MEMS gyroscope

A technology of output feedback and control methods, applied in gyroscope/steering sensing equipment, measuring devices, adaptive control, etc., can solve the problems of unmeasurable speed signals of controllers and unsuitable engineering applications

Active Publication Date: 2020-11-06
北京爱宾果科技有限公司
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Problems solved by technology

[0003] In view of this, the present invention provides a MEMS gyroscope output feedback control method and device to overcome the problem that existing controllers are not suitable for engineering applications due to unmeasurable speed signals during the drive control process of MEMS gyroscopes

Method used

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  • Output feedback control method and device of MEMS gyroscope
  • Output feedback control method and device of MEMS gyroscope
  • Output feedback control method and device of MEMS gyroscope

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Embodiment Construction

[0050] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0051] see figure 1 , the embodiment of the present invention discloses an output feedback control method of a MEMS gyroscope, comprising:

[0052] Step S01: Construct a MEMS gyro dynamics model considering external disturbances. The specific process is as follows:

[0053] The MEMS gyro dynamics model considering external disturbance is:

[0054]

[0055] In formula (1), x and y are the displacements of MEMS gyroscope proof mass along the drive axis and...

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Abstract

The invention discloses an output feedback control method and device of an MEMS gyroscope, and aims at solving the problem that an existing controller is not suitable for engineering application due to the fact that a speed signal cannot be measured in a driving control process of an MEMS gyroscope. The method comprises the following steps: constructing an MEMS gyroscope kinetic model consideringexternal interference; constructing a sliding mode observer for estimating an unmeasurable speed signal and a disturbance observer for estimating external disturbance according to the MEMS gyroscope kinetic model; constructing an output feedback controller; and adopting the sliding mode observer, the disturbance observer and the output feedback controller to drive the MEMS gyroscope dynamic model.

Description

technical field [0001] The invention relates to the field of intelligent instruments and meters, and more specifically relates to an output feedback control method and device of a MEMS gyroscope. Background technique [0002] MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) gyroscopes are widely used in angular velocity measurement fields such as robots, consumer electronics, and wearable devices. The driving control performance of MEMS gyroscope directly affects the measurement accuracy of angular rate. However, since the velocity signal of the MEMS gyroscope proof mass is unmeasurable, any controller that uses the velocity signal cannot be used in engineering during the driving control process of the MEMS gyroscope. For example, conventional PID controllers cannot be used in engineering applications. does not degenerate into a PI controller, which severely limits its drive control performance. Contents of the invention [0003] In view of this, t...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/04G01C19/00
CPCG05B13/042G01C19/00
Inventor 闵海波张睿许斌
Owner 北京爱宾果科技有限公司
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