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Test machine moving and loading device and method

A technology of mobile devices and testing machines, which is applied in the direction of measuring devices, measuring device casings, and components of electrical measuring instruments, etc. It can solve the problems of easy damage at the connection between the arm and the counterweight box, the space occupied by the counterweight box, and the difficulty of easy transfer. , to achieve the effect of saving associated parts, easy to move and carry, and stable structure

Inactive Publication Date: 2020-12-11
上海伟测半导体科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, there are many defects in this device. For example, the existence of the counterweight box takes up a lot of space, and makes the device itself very bulky and difficult to transfer easily. There are also strict quality requirements for the arms, and the connection between the arms and the counterweight box is easily damaged.

Method used

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  • Test machine moving and loading device and method
  • Test machine moving and loading device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Embodiment 1 provides a device for moving and loading a testing machine. The embodiments described below with reference to the accompanying drawings are exemplary, and are only used to explain the present invention, and should not be construed as limiting the present invention. Such as figure 2 As shown, the moving and loading device of the testing machine includes:

[0030] Base 1, X-direction adjustment device, Y-direction adjustment device, Z-direction adjustment device and test head clamping device 30, X / Y / Z directions are perpendicular to each other;

[0031] The X-direction adjustment device and the Y-direction adjustment device are stacked on the base 1; the test head clamping device 30 is arranged above the X-direction adjustment device and the Y-direction adjustment device; the X-direction adjustment The device adjusts the position of the test head clamping device 30 in the X direction, and the Y direction adjustment device adjusts the position of the test he...

Embodiment 2

[0035] This embodiment 2 provides a device for moving and loading a testing machine, which can be further optimized or improved on the basis of embodiment 1. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention. It should not be construed as a limitation of the present invention. Such as figure 2 As shown, the moving and loading device of the testing machine includes:

[0036] In the initial state, the centers of gravity of the X-direction adjusting device, the Y-direction adjusting device, the Z-direction adjusting device and the test head clamping device 30 overlap.

[0037] The Z-direction adjustment device includes a support foot 401, a screw 402 and a Z adjustment handle 403, the screw 402 is rotatable relative to the base driven by the Z adjustment handle 403, the screw 402 passes through the base 1 and It is threadedly engaged with the base 1.

[0038] In addition, the support fo...

Embodiment 3

[0054] This embodiment 3 provides a device for moving and loading a testing machine, which can be further optimized or improved on the basis of embodiment 1 or embodiment 2. The embodiments described below with reference to the accompanying drawings are exemplary and are only used for The present invention is explained, but should not be construed as limiting the present invention. Such as figure 2 As shown, the moving and loading device of the testing machine includes:

[0055] The first moving device 13 includes a first rail 131 arranged on the first fixed plate 11, a first lead screw 133 arranged on the first rail 131, and a first slider 132 sleeved on the first rail 131. On the first lead screw 133, the first slider 132 is fixedly connected with the first moving plate 12, the telescopic rod of the first adjustment handle 134 is fixedly connected with the first slider 132, and the first adjustment handle 134 rotates , the telescopic rod of the first adjusting handle driv...

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Abstract

The invention discloses a test machine moving and loading device. The test machine moving and loading device comprises a base, an X-direction adjusting device, a Y-direction adjusting device, Z-direction adjusting devices and a testing head clamping device, an X direction, a Y direction and a Z direction are perpendicular to each other; the X-direction adjusting device and the Y-direction adjusting device are arranged on the base in a stacked mode; the test head clamping device is arranged above the X-direction adjusting device and the Y-direction adjusting device; the X-direction adjusting device adjusts the position of the test head clamping device in the X direction, and the Y-direction adjusting device adjusts the position of the test head clamping device in the Y direction; the Z-direction adjusting devices are distributed on the periphery of the base and penetrate through the base so as to adjust the height and inclination of the base. The device is stable in structure, high in flexibility, convenient to move and carry, safe and reliable; and a weight box and related parts of the weight box are omitted.

Description

technical field [0001] The invention relates to the field of semiconductor testing equipment, in particular to a device and method for moving and loading a testing machine. Background technique [0002] The testing process of semiconductors is an important part of the entire integrated circuit manufacturing process. For different types of products, the test requirements are different, which requires replacement of the test head. [0003] At present, mainstream test head holders such as figure 1 Shown, visible, including the following structure: [0004] Support frame A1, counterweight box A2, arms A3, up and down moving device A4. In specific use, the up and down moving device including slide rails, belts or chains moves under the action of power, and the weight of the counterweight box is used to drive the arm A3 and the test head A5 installed on the arm A3 to move up and down. [0005] However, there are many defects in this device. For example, the existence of the co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/02G01R1/04
CPCG01R1/02G01R1/04
Inventor 傅郁晓李志成吴庆骈文胜
Owner 上海伟测半导体科技股份有限公司