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Cooling System

A refrigeration system and refrigeration circuit technology, which is applied in the direction of refrigerators, refrigeration components, refrigeration and liquefaction, etc., can solve the problem of high energy consumption of refrigeration, achieve the effect of reducing system energy consumption and ensuring system safety

Active Publication Date: 2022-03-18
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Most of the temperature control devices use compressor refrigeration. When the operating temperature is higher than 25°C, the energy consumption of compressor refrigeration is higher than that of direct refrigeration using heat exchangers.

Method used

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Embodiment Construction

[0025] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.

[0026] In the description of the embodiments of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the embodiments of the present invention and simplified descriptions, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descript...

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Abstract

The present invention relates to the field of semiconductor manufacturing technology, in particular to a refrigeration system, including a compression refrigeration circuit, a cooling water refrigeration circuit, a circulating liquid circuit and a heat exchanger, the heat release path of the heat exchanger communicates with the circulating liquid circuit, and the first part of the heat exchanger The heat absorption path communicates with the compression refrigeration circuit, and the second heat absorption path of the heat exchanger communicates with the cooling water refrigeration circuit. According to different temperature conditions, different cooling modes are operated. Under low temperature conditions, the compression refrigeration mode can be selected, and under high temperature conditions, all three modes can be selected to reduce system energy consumption under high temperature conditions.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a refrigeration system. Background technique [0002] At present, in the semiconductor process, the semiconductor temperature control device is used as an auxiliary equipment for the production of semiconductors. It needs to output different temperatures in the process of wafers and liquid crystal panels. The equipment needs to maintain a constant output temperature in the actual process. The temperature control device requires a wide range, covering a relatively wide temperature range formed from low temperature to high temperature (typically 10°C to 80°C). Most of the temperature control devices use compressor refrigeration. When the operating temperature is higher than 25°C, the energy consumption of compressor refrigeration is higher than that of direct refrigeration using heat exchangers. Contents of the invention [0003] The present invention aims to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F25B41/20F25B41/40
CPCF25B2600/25
Inventor 冯涛芮守祯靳李富李文博耿海东吕志伟宋朝阳何茂栋曹小康董春辉
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD