Chamber uncovering mechanism

Abstract

The invention discloses a chamber uncovering mechanism convenient for uncovering in a semiconductor vacuum transmission system. The chamber uncovering mechanism comprises a chamber main body, whereinthe chamber main body is provided with an accommodating chamber and an opening leading into the accommodating chamber; a cover body which can cover the opening, wherein the cover body is rotatably connected with the chamber main body; a gas spring which is provided with a first connecting end and a second connecting end, wherein the first connecting end is rotatably connected with the chamber mainbody, and the second connecting end is rotatably connected with the cover body; the gas spring is in a compressed state when the cover body is located at the covering position and abuts against the cover body upwards.

Description

technical field [0001] The invention relates to the field of semiconductor vacuum transmission systems, in particular to a chamber cover opening mechanism. Background technique [0002] In the semiconductor vacuum transmission system, in order to maintain and debug the vacuum equipment, it is necessary to open the cover to clean the cavity and the inside of the robot, and to move the robot, robot arm or robot end effector. Generally, the vacuum transmission equipment is located between multiple devices, and the peripheral equipment is higher than the vacuum transmission equipment, which limits the operable space. [0003] The diameter of the cover of the vacuum transfer equipment can reach 900 mm, and the weight can reach 30 kg. The cover is heavy and the operable space is small, so it is not suitable for direct disassembly and horizontal movement of the cover. [0004] At present, the lid hinge is usually used for positioning, so that the lid can be rotated and opened arou...

AI Technical Summary

Problems solved by technology

The cover can be stopped in the middle of rotation, but this method of opening the cover requires a large installation position due to the mechanical structure of the gear, and the internal structure is a gear structure. When the cover is opened and closed, the gears will generate friction, which will generate a certain amount of pollution particles. Manufacturing higher cost

Moreover, this way of opening the lid will cause deformation and damage due to the excessive force of closing the lid and excessive extrusion of the sealing ring.

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