Intelligent compound robot for wafer box transferring

Abstract

The invention discloses an intelligent compound robot for wafer box transferring, and belongs to the technical field of automatic robots. The robot comprises an AGV transfer vehicle, a mechanical arm,an inserting frame mechanism and a visual positioning device. The mechanical arm is arranged on the AGV transfer vehicle; the inserting frame mechanism is installed on the mechanical arm, the inserting frame mechanism is driven by the mechanical arm to do axial movement and 360-degree steering movement synchronously or independently, and the axial movement comprises resultant displacement in theX direction, the Y direction and the Z direction in a single direction or in multiple axial directions at the same time; and the visual positioning device arranged on the inserting frame mechanism compensates the moving error of the AGV transfer vehicle so as to achieve the purpose of high-precision carrying of products under the conditions of high load and large operation radius.

Description

technical field [0001] The invention belongs to the technical field of automatic robots, and in particular relates to an intelligent composite robot for transferring cassettes. Background technique [0002] A composite robot refers to a programmable and multifunctional mobile handling device, which is used to carry materials, parts, tools, or have special robots for performing different tasks in different positions. It is a multi-joint manipulator or multi-freedom robot for the industrial field. degree robot. [0003] In the context of "Industry 4.0" and "Made in China 2025", the importance and necessity of industrial development of composite handling robots as a strategic tool for smart factories to improve work efficiency cannot be ignored. The research and development of products and the development of standards need to be promoted in coordination. A set of advanced technical indicators and a coordinated industrial robot standard system in various fields guide the develo...

AI Technical Summary

Problems solved by technology

[0004] The existing composite robots on the market generally use AGV to cooperate with standard robots, which have problems such as light load, small working radius, insufficient battery life and high cost. It is difficult to meet the requirements of high precision, large load and large space operation at the same time.

[0005] With the development of Industry 4.0, especially in the semiconductor industry, the demand for precision transfer compound robots is increasing. Therefore, the traditional combination of standard AGV and standard general-purpose robots is difficult to meet the needs of the industry.

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