Micro-mirror structure and manufacturing method thereof, micro-mirror array and detector

Abstract

The invention discloses a micro-mirror structure, which comprises the components of a hexagonal light reflecting film which is suspended on a substrate; six sections of deformation beams sequentiallysurround the outer side or the lower side of the light reflecting film in an end-to-end adjacent or connected mode, and each section of deformation beam is connected to the outer side of one corresponding edge of the light reflecting film in an insulating mode through a fulcrum structure; and six supporting columns are respectively supported below adjacent or connected endpoints of every two sections of deformation beams; at least one section of deformation beam is electrified, so that the deformation beam generates bending deformation in the upward or downward direction relative to the lengthdirection of the deformation beam due to electrification and heating, the corresponding edge of the light reflection film connected with the deformation beam is driven to move upwards or downwards, and different combinations of deformation sizes formed by respectively controlling the deformation beams are executed. The deflection or / and up-down floating of the light reflecting film towards any preset direction is / are achieved. The invention further discloses a manufacturing method of the micro-mirror structure, a micro-mirror array and a detector.

Description

technical field [0001] The invention relates to the technical field of semiconductor integrated circuits and detectors, in particular to a micromirror structure capable of deflecting in any direction, a manufacturing method thereof, a micromirror array and a detector. Background technique [0002] At present, micromirrors have become an important member of micro-electromechanical systems (MEMS) products, and have begun to be used in vehicle-mounted laser radars. With the development of autonomous driving technology, higher and higher requirements are placed on lidar and its MEMS micromirror technology. [0003] Among them, it has become a relatively mature technology to realize the control of the deflection angle of the micromirror by means of electrostatic driving. However, when adjusting the deflection angle of the micromirror through electrostatic field control, it is often necessary to design a very complicated deflection structure, such as a comb structure, which undou...

AI Technical Summary

Problems solved by technology

However, when adjusting the deflection angle of the micromirror through electrostatic field control, it is often necessary to design a very complicated deflection structure, such as a comb structure, which undoubtedly increases the difficulty of control, and it can only make the micromirror plane along a fixed Axial deflection, so it is difficult to meet the wide range of requirements for the deflection direction of the micromirror in actual use scenarios

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