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Net stretching device and net stretching method

A pre-alignment and die-striping technology, applied in the fields of vacuum evaporation plating, coating, electro-solid device, etc. Efficiency, improve the precision of the net, and reduce the cost of production

Active Publication Date: 2022-02-15
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to provide a netting device and a netting method to solve the problem that multiple netting devices are needed to prepare a metal mask and the netting efficiency is not high

Method used

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  • Net stretching device and net stretching method
  • Net stretching device and net stretching method
  • Net stretching device and net stretching method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 1 As shown, the present embodiment provides a netting device, including:

[0032] The stretching module includes a carrying platform 11 and a clamping unit 12, the carrying platform 11 is used to carry the support frame, and the clamping unit 12 is used to complete the stretching of the metal mask strips in the X direction and the Y direction;

[0033] The pre-alignment module includes a pre-alignment stage 21 and a detection unit 22, the pre-alignment stage 21 provides a carrying space for the metal mask strips in the X direction and the Y direction, and the detection unit 22 detects the metal mask strips The alignment mark on is used to correct the position of the metal mask strip relative to the pre-alignment stage 21;

[0034] The transfer module is used to pick up the metal mask strip and transfer the metal mask strip to the support frame.

[0035] Specifically, see figure 1 and figure 2 , the support frame is arranged on the carrier platform 11...

Embodiment 2

[0044] Such as image 3 As shown, the difference from Embodiment 1 is that in this embodiment, there are two pre-alignment stations 21, and the two pre-alignment stations 21 are respectively located on opposite sides of the stretching module, one of which The pre-alignment stage 21 extends along the X direction, and the other pre-alignment stage 21 extends along the Y direction. The pre-alignment stage 21 extending along the X direction provides a carrying space for the metal mask strips in the X direction, and the pre-alignment stage 21 extending along the Y direction provides a carrying space for the metal mask strips in the Y direction, that is, along the X direction The pre-alignment stage 21 extending in the direction is used for placing the metal mask strips in the X direction, and the pre-alignment stage 21 extending in the Y direction is used for placing the metal mask strips in the Y direction.

[0045] Further, the pre-alignment module also has two first gantry fram...

Embodiment 3

[0048] Such as Figure 4 As shown, this embodiment provides the use of Figure 1-Figure 3 The method for stretching the net shown by the net stretching device includes:

[0049] Step S1: placing the metal mask strip on the pre-alignment stage along its stretching direction;

[0050] Step S2: Correcting the position of the metal mask strip relative to the pre-alignment stage by detecting the alignment mark on the metal mask strip;

[0051] Step S3: Transfer the metal mask strips to the support frame and stretch the net.

[0052] Specifically, the preparation of the metal mask usually requires the netting of FMM metal mask strips, side stick metal mask strips, cover metal mask strips and support metal mask strips, wherein the FMM metal mask strips, side stick metal mask strips The stretching direction of the mold strip and the cover metal mask strip is the X direction, and the stretching direction of the support metal mask strip is the Y direction.

[0053] Such as Figure ...

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Abstract

The invention provides a net stretching device and a net stretching method, which include a net stretching module, a pre-alignment module and a transmission module. The clamping unit for the stretching of the metal mask strips, the pre-alignment module includes a pre-alignment table that provides a carrying space for the metal mask strips in the first direction and the second direction and detects alignment marks on the metal mask strips The detection unit of the detection unit can correct the position of the metal mask strip relative to the pre-alignment table according to the detection result of the detection unit. After the alignment is completed, the transmission module picks up the metal mask strip and transmits the metal mask strip to the support frame The netting is performed on the upper side, which improves the precision of the netting, and the netting of the metal mask strips in the first direction and the second direction can be completed in only one netting device, which improves the netting efficiency and reduces the cost of the metal mask. production cost.

Description

technical field [0001] The invention relates to the technical field of semiconductor preparation, in particular to a net stretching device and a net stretching method. Background technique [0002] OLED display technology has developed into one of the mainstream display technologies today, and one of the key processes for its production is the production of metal masks. Now the production of metal masks takes a long time, has low precision, and involves a lot of equipment. For example, for the stretching part, at least two stretching devices are required to complete a metal mask, which are Fine Metal Mask (FMM) stretching device and Common Metal Mask (CMM) stretching device respectively. The FMM stretching equipment is mainly responsible for stretching the fine metal mask strips (FMM metal mask strips) and alignment mark metal mask strips (side stick metal mask strips). The stretching direction is the X direction, and the support mask sheet The net device is mainly responsi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04H01L51/56
CPCC23C14/042H10K71/166H10K71/00
Inventor 郝征李志丹唐世弋
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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